Abstract
This paper proposes a two degree of freedom control using a combined feedforward/feedback architecture for MIMO nanopositioning stages. The proposed control system provides higher bandwidth and better performance compared with a single degree of freedom feedback controller. The paper proposes a systematic synthesis methodology to design the controller based on closed loop performance. The results are verified via simulation and hardware experiment.
| Original language | English |
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| Title of host publication | European Control Conference (ECC), 2014, 24-27 June 2014, Strasbourg, France |
| Place of Publication | Piscataway |
| Publisher | IEEE |
| Pages | 1939 - 1944 |
| ISBN (Print) | 978-3-9524269-1-3 |
| Publication status | Published - 2014 |
| Event | The 13th European Control Conference (ECC) - Strasbourg, France Duration: 24 Jun 2014 → 27 Jun 2014 |
Conference
| Conference | The 13th European Control Conference (ECC) |
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| City | Strasbourg, France |
| Period | 24/06/14 → 27/06/14 |
Keywords
- nanopositioning, Feedforward/Feedback, control, AFM, 2DoF