TY - JOUR
T1 - Fluidized bed chemical vapor deposition of pyrolytic carbon - I. Effect of deposition conditions on microstructure
AU - Lopez Honorato, Eddie
AU - López-Honorato, E.
AU - Meadows, P. J.
AU - Xiao, P.
PY - 2009/2
Y1 - 2009/2
N2 - The effect of deposition temperature and precursor concentration on the microstructure of pyrolytic carbon (PyC) has been studied by using SEM, TEM, Raman spectroscopy, X-ray diffraction and porosimetry. PyC was produced by fluidized bed chemical vapor deposition (FBCVD) at deposition temperatures from 1250 to 1450 °C and with acetylene and acetylene/propylene mixtures at different concentrations. Changes in the density, anisotropy, and microstructure of PyC, controlled by the deposition temperature and precursor concentration, were correlated to variations in the CVD growth or nucleation mechanism. Raman spectroscopy of PyC showed that the changes in the intensity of the D band and G band, generally used for the measurement of domain size (La), cannot be applied for low texture pyrolytic carbons. Previous models explaining fluidized bed chemical vapor deposition have been reviewed and compared with recently developed deposition theories in order to establish a better description of the deposition process. © 2008 Elsevier Ltd. All rights reserved.
AB - The effect of deposition temperature and precursor concentration on the microstructure of pyrolytic carbon (PyC) has been studied by using SEM, TEM, Raman spectroscopy, X-ray diffraction and porosimetry. PyC was produced by fluidized bed chemical vapor deposition (FBCVD) at deposition temperatures from 1250 to 1450 °C and with acetylene and acetylene/propylene mixtures at different concentrations. Changes in the density, anisotropy, and microstructure of PyC, controlled by the deposition temperature and precursor concentration, were correlated to variations in the CVD growth or nucleation mechanism. Raman spectroscopy of PyC showed that the changes in the intensity of the D band and G band, generally used for the measurement of domain size (La), cannot be applied for low texture pyrolytic carbons. Previous models explaining fluidized bed chemical vapor deposition have been reviewed and compared with recently developed deposition theories in order to establish a better description of the deposition process. © 2008 Elsevier Ltd. All rights reserved.
U2 - 10.1016/j.carbon.2008.10.023
DO - 10.1016/j.carbon.2008.10.023
M3 - Article
SN - 0008-6223
VL - 47
SP - 396
EP - 410
JO - Carbon
JF - Carbon
IS - 2
ER -