Fluorine enriched SOI (FSOI): A novel solution for future ultra shallow junction devices!

Huda El Mubarek; H. A. W. El Mubarek; P. Ashburn

Fluorine enriched SOI (FSOI): A novel solution for future ultra shallow junction devices!

Huda El Mubarek, H. A. W. El Mubarek, P. Ashburn

Research output: Contribution to conference › Other

Original language	English
Publication status	Published - Oct 2006
Event	NATO International Advanced Research Workshop "Nanoscaled Semiconductor-on-Insulator Structures and Devices - Sudak,Crimea,Ukraine Duration: 15 Oct 2006 → 19 Oct 2006

Conference

Conference	NATO International Advanced Research Workshop "Nanoscaled Semiconductor-on-Insulator Structures and Devices
City	Sudak,Crimea,Ukraine
Period	15/10/06 → 19/10/06

Cite this

@conference{36e39ac1fc054801aa23a57ee396268d,

title = "Fluorine enriched SOI (FSOI): A novel solution for future ultra shallow junction devices!",

author = "{El Mubarek}, Huda and Mubarek, {H. A. W. El} and P. Ashburn",

year = "2006",

month = oct,

language = "English",

note = "NATO International Advanced Research Workshop {"}Nanoscaled Semiconductor-on-Insulator Structures and Devices ; Conference date: 15-10-2006 Through 19-10-2006",

}

TY - CONF

T1 - Fluorine enriched SOI (FSOI): A novel solution for future ultra shallow junction devices!

AU - El Mubarek, Huda

AU - Mubarek, H. A. W. El

AU - Ashburn, P.

PY - 2006/10

Y1 - 2006/10

M3 - Other

T2 - NATO International Advanced Research Workshop "Nanoscaled Semiconductor-on-Insulator Structures and Devices

Y2 - 15 October 2006 through 19 October 2006

ER -