Fluorine enriched SOI (FSOI): A novel solution for future ultra shallow junction devices

Huda El Mubarek, H.A.W. El Mubarek, P. Ashburn

Research output: Contribution to conference › Other

Original language	English
Publication status	Published - Apr 2007
Event	Materials Research Society Spring 2007 Meeting - San Francisco Duration: 9 Apr 2007 → 13 Apr 2007

Conference	Materials Research Society Spring 2007 Meeting
City	San Francisco
Period	9/04/07 → 13/04/07

Cite this

@conference{e877795399f64a8ea9c83d585f949ba0,

title = "Fluorine enriched SOI (FSOI): A novel solution for future ultra shallow junction devices",

author = "{El Mubarek}, Huda and Mubarek, {H.A.W. El} and P. Ashburn",

year = "2007",

month = apr,

language = "English",

note = "Materials Research Society Spring 2007 Meeting ; Conference date: 09-04-2007 Through 13-04-2007",

}