Formation of ultraviolet laser-annealed mesoporous anatase films by a sol-gel process

We report a novel technique for generation of nanocrystalline mesoporous anatase-based titania films by laser annealing through a CeO2 modified sol-gel system. Amorphous titania films deposited on Pt(Si) substrates were subjected to a KrF excimer laser beam (248 nm, 13 ns) for crystallization. Anatase as a dominant phase was achieved at a laser fluence of 30-40 mJ cm-2 while higher fluence favored rutile phase. Raman spectroscopy, field emission gun scanning electron microscopy and atomic force microscopy were used to characterize the crystalline structure and morphology of the CeO2-doped titania films. © 2008 Acta Materialia Inc.