Growth of patterned thin metal oxide films on glass substrates from metallic bulk sources using a Q-switched YAG laser

N. Mir-Hosseini; M. J J Schmidt; L. Li

doi:10.1016/j.apsusc.2005.03.113

Growth of patterned thin metal oxide films on glass substrates from metallic bulk sources using a Q-switched YAG laser

N. Mir-Hosseini, M. J J Schmidt, L. Li

Research output: Contribution to journal › Article › peer-review

Abstract

This paper reports a novel technique of thin film deposition by using a 75 W Q-switched Nd:YAG laser from bulk metal powder under atmospheric conditions. The laser radiation is transmitted through the substrate, before irradiation of the metallic target. The substrate and the target are in proximity contact, resulting in fast and efficient deposition. This process is faster and cheaper compared to the traditional methods for generating patterned oxide films on substrates. An initial relationship between the laser processing parameters and deposition showed an optimal operating region. SEM, XPS and RBS were used to characterise the materials. A thin SnO2 film of 100-200 nm thickness was identified in the coatings. Tin, copper and stainless steel powders were also examined and the deposition process was found to be feasible for all three. © 2005 Elsevier B.V. All rights reserved.

Original language	English
Pages (from-to)	204-208
Number of pages	4
Journal	Applied Surface Science
Volume	248
Issue number	1-4
DOIs	https://doi.org/10.1016/j.apsusc.2005.03.113
Publication status	Published - 30 Jul 2005

Keywords

Deposition on glass
Laser ablation
Laser deposition
Nd:YAG laser
PLD
RBS
Thin film deposition
Tin oxide
XPS

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10.1016/j.apsusc.2005.03.113

LPRC: Laser Processing Research Centre Impact
Allegre, O. (PI), Crosby, D. (PI), Domingos, M. (PI), Francis, J. (PI), Gillen, D. (PI), Guo, W. (PI), Li, L. (PI), Mativenga, P. (PI), Rogers, B. D. (PI), Whitehead, D. (PI), Wilson, D. (PI), Zhong, S. (PI), Mirhosseini, N. (Researcher), Ouyang, J. (Researcher), Huang, Y. (Researcher), Wei, C. (Researcher), Cheng, D. (PGR student), Suryo Pratomo, E. (PGR student), Zhang, Z. (PGR student), Li, Z. (PGR student), Mo, H. (PGR student), Zhu, M. (PGR student), Li, Q. (PGR student), Liu, W. (PGR student), Wang, L. (PGR student), Guo, H. (PGR student), Heinemann, R. (PI) & Liu, Z. (PI)
1/04/00 → …
Project: Research

Cite this

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title = "Growth of patterned thin metal oxide films on glass substrates from metallic bulk sources using a Q-switched YAG laser",

abstract = "This paper reports a novel technique of thin film deposition by using a 75 W Q-switched Nd:YAG laser from bulk metal powder under atmospheric conditions. The laser radiation is transmitted through the substrate, before irradiation of the metallic target. The substrate and the target are in proximity contact, resulting in fast and efficient deposition. This process is faster and cheaper compared to the traditional methods for generating patterned oxide films on substrates. An initial relationship between the laser processing parameters and deposition showed an optimal operating region. SEM, XPS and RBS were used to characterise the materials. A thin SnO2 film of 100-200 nm thickness was identified in the coatings. Tin, copper and stainless steel powders were also examined and the deposition process was found to be feasible for all three. {\textcopyright} 2005 Elsevier B.V. All rights reserved.",

keywords = "Deposition on glass, Laser ablation, Laser deposition, Nd:YAG laser, PLD, RBS, Thin film deposition, Tin oxide, XPS",

author = "N. Mir-Hosseini and Schmidt, {M. J J} and L. Li",

year = "2005",

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doi = "10.1016/j.apsusc.2005.03.113",

language = "English",

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journal = "Applied Surface Science",

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TY - JOUR

T1 - Growth of patterned thin metal oxide films on glass substrates from metallic bulk sources using a Q-switched YAG laser

AU - Mir-Hosseini, N.

AU - Schmidt, M. J J

AU - Li, L.

PY - 2005/7/30

Y1 - 2005/7/30

N2 - This paper reports a novel technique of thin film deposition by using a 75 W Q-switched Nd:YAG laser from bulk metal powder under atmospheric conditions. The laser radiation is transmitted through the substrate, before irradiation of the metallic target. The substrate and the target are in proximity contact, resulting in fast and efficient deposition. This process is faster and cheaper compared to the traditional methods for generating patterned oxide films on substrates. An initial relationship between the laser processing parameters and deposition showed an optimal operating region. SEM, XPS and RBS were used to characterise the materials. A thin SnO2 film of 100-200 nm thickness was identified in the coatings. Tin, copper and stainless steel powders were also examined and the deposition process was found to be feasible for all three. © 2005 Elsevier B.V. All rights reserved.

AB - This paper reports a novel technique of thin film deposition by using a 75 W Q-switched Nd:YAG laser from bulk metal powder under atmospheric conditions. The laser radiation is transmitted through the substrate, before irradiation of the metallic target. The substrate and the target are in proximity contact, resulting in fast and efficient deposition. This process is faster and cheaper compared to the traditional methods for generating patterned oxide films on substrates. An initial relationship between the laser processing parameters and deposition showed an optimal operating region. SEM, XPS and RBS were used to characterise the materials. A thin SnO2 film of 100-200 nm thickness was identified in the coatings. Tin, copper and stainless steel powders were also examined and the deposition process was found to be feasible for all three. © 2005 Elsevier B.V. All rights reserved.

KW - Deposition on glass

KW - Laser ablation

KW - Laser deposition

KW - Nd:YAG laser

KW - PLD

KW - RBS

KW - Thin film deposition

KW - Tin oxide

KW - XPS

U2 - 10.1016/j.apsusc.2005.03.113

DO - 10.1016/j.apsusc.2005.03.113

M3 - Article

SN - 0169-4332

VL - 248

SP - 204

EP - 208

JO - Applied Surface Science

JF - Applied Surface Science

IS - 1-4

ER -

Growth of patterned thin metal oxide films on glass substrates from metallic bulk sources using a Q-switched YAG laser

Abstract

Keywords

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