Heating effects in ionization-assisted processes

Engineering

• Heating Effect 100%
• Increasing Temperature 50%
• Heat Source 50%
• Ionization Efficiency 50%
• Substrate Temperature 50%
• Assisted Chemical Vapor Deposition 50%
• Thermodynamic Model 50%
• Relative Importance 50%
• Nitriding 50%
• Discharge Condition 50%
• Limiting Current Density 50%
• Emissivity 50%