Homoleptic single molecular precursors for the deposition of platinum and palladium chalcogenide thin films

P. L. Musetha, N. Revaprasadu, G. A. Kolawole, Rajasekhar V S R Pullabhotla, K. Ramasamy, P. O'Brien

    Research output: Contribution to journalArticlepeer-review

    Abstract

    Platinum and palladium dithio/diselenoimidodiphosphinato complexes have been synthesized and used as single source precursors for the deposition of platinum and palladium chalcogenide thin films by the Low Pressure Chemical Vapour Deposition technique. Pure PtSe2 thin films were deposited at varying temperatures from the [Pt{N(SePiPr2) 2}2] complex. However, only Pt films were obtained from the sulfur analogue. The palladium diselenoimidodiphosphinato complex gave palladium selenide films with different stochiometries depending on the growth temperature. The corresponding sulfur complex gave PdS2 films with a regular platelet-like morphology. © 2010 Elsevier B.V. All rights reserved.
    Original languageEnglish
    Pages (from-to)197-202
    Number of pages5
    JournalThin Solid Films
    Volume519
    Issue number1
    DOIs
    Publication statusPublished - 29 Oct 2010

    Keywords

    • Chalcogenides
    • Chemical vapour deposition
    • Palladium selenide
    • Palladium sulphide
    • Scanning electron microscopy
    • Thin films
    • X-ray diffraction

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