Imaging and analysis of 3-D structure using a dual beam FIB

Duncan Mcgrouther; D. McGrouther; P. R. Munroe

doi:10.1002/jemt.20406

Imaging and analysis of 3-D structure using a dual beam FIB

Duncan Mcgrouther, D. McGrouther, P. R. Munroe

Research output: Contribution to journal › Article › peer-review

Abstract

The application of focused ion beam instrumentation in the generation of three-dimensional microstructural data is described. The methodologies used to acquire and manipulate this data are explained, and the technique is illustrated by a number of examples from the material sciences. The limitations of this method, and practical pointers to the generation of meaningful data, are also discussed. © 2007 Wiley-Liss, Inc.

Original language	English
Pages (from-to)	186-194
Number of pages	8
Journal	Microscopy Research and Technique
Volume	70
Issue number	3
DOIs	https://doi.org/10.1002/jemt.20406
Publication status	Published - Mar 2007

Keywords

3D microscopy
FIB cross-sectioning
Materials science

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10.1002/jemt.20406

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title = "Imaging and analysis of 3-D structure using a dual beam FIB",

abstract = "The application of focused ion beam instrumentation in the generation of three-dimensional microstructural data is described. The methodologies used to acquire and manipulate this data are explained, and the technique is illustrated by a number of examples from the material sciences. The limitations of this method, and practical pointers to the generation of meaningful data, are also discussed. {\textcopyright} 2007 Wiley-Liss, Inc.",

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year = "2007",

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AU - Mcgrouther, Duncan

AU - McGrouther, D.

AU - Munroe, P. R.

PY - 2007/3

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N2 - The application of focused ion beam instrumentation in the generation of three-dimensional microstructural data is described. The methodologies used to acquire and manipulate this data are explained, and the technique is illustrated by a number of examples from the material sciences. The limitations of this method, and practical pointers to the generation of meaningful data, are also discussed. © 2007 Wiley-Liss, Inc.

AB - The application of focused ion beam instrumentation in the generation of three-dimensional microstructural data is described. The methodologies used to acquire and manipulate this data are explained, and the technique is illustrated by a number of examples from the material sciences. The limitations of this method, and practical pointers to the generation of meaningful data, are also discussed. © 2007 Wiley-Liss, Inc.

KW - 3D microscopy

KW - FIB cross-sectioning

KW - Materials science

U2 - 10.1002/jemt.20406

DO - 10.1002/jemt.20406

M3 - Article

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SN - 1097-0029

VL - 70

SP - 186

EP - 194

JO - Microscopy Research and Technique

JF - Microscopy Research and Technique

IS - 3

ER -

Imaging and analysis of 3-D structure using a dual beam FIB

Abstract

Keywords

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