Imaging Secondary Ion Mass Spectroscopy

K L Moore, M Schröder, C R M Grovenor

    Research output: Chapter in Book/Report/Conference proceedingChapter

    Original languageEnglish
    Title of host publicationHandbook of Nanoscopy
    PublisherJohn Wiley & Sons Ltd
    Pages709-744
    Number of pages36
    Volume2
    ISBN (Print)9783527317066 (ISBN)
    DOIs
    Publication statusPublished - 2012

    Keywords

    • Matrix effect
    • SIMS
    • Sputter yield
    • Sputtering
    • Static limit
    • Transient

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