Influence of annealing on the hydrogen bonding and the microstructure of diamondlike and polymerlike hydrogenated amorphous carbon films

Y. Bounouh, M. L. Thèye, A. Dehbi-Alaoui, A. Matthews, J. P. Stoquert

Research output: Contribution to journalArticlepeer-review

Abstract

The influence of hydrogen incorporation on the microstructure of hydrogenated amorphous carbon (a-C:H) films has been studied in detail by applying several complementary methods, i.e., elastic recoil detection analysis (ERDA), hydrogen evolution, and infrared absorption measurements, to two series of samples prepared by two different techniques, respectively representative of diamondlike and polymerlike a-C:H. The analysis of the changes of the infrared vibrational spectra over a large frequency range upon annealing at increasing temperatures up to 600°C allowed us to get insights into both the C-H and C-C bonding modifications.

Original languageEnglish
Pages (from-to)9597-9605
Number of pages9
JournalPhysical Review B
Volume51
Issue number15
DOIs
Publication statusPublished - 15 Apr 1995

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