Influence of annealing on the hydrogen bonding and the microstructure of diamondlike and polymerlike hydrogenated amorphous carbon films

Y. Bounouh; M. L. Thèye; A. Dehbi-Alaoui; A. Matthews; J. P. Stoquert

doi:10.1103/PhysRevB.51.9597

Influence of annealing on the hydrogen bonding and the microstructure of diamondlike and polymerlike hydrogenated amorphous carbon films

Y. Bounouh^*, M. L. Thèye, A. Dehbi-Alaoui, A. Matthews, J. P. Stoquert

^*Corresponding author for this work

Materials Engineering

Research output: Contribution to journal › Article › peer-review

Abstract

The influence of hydrogen incorporation on the microstructure of hydrogenated amorphous carbon (a-C:H) films has been studied in detail by applying several complementary methods, i.e., elastic recoil detection analysis (ERDA), hydrogen evolution, and infrared absorption measurements, to two series of samples prepared by two different techniques, respectively representative of diamondlike and polymerlike a-C:H. The analysis of the changes of the infrared vibrational spectra over a large frequency range upon annealing at increasing temperatures up to 600°C allowed us to get insights into both the C-H and C-C bonding modifications.

Original language	English
Pages (from-to)	9597-9605
Number of pages	9
Journal	Physical Review B
Volume	51
Issue number	15
DOIs	https://doi.org/10.1103/PhysRevB.51.9597
Publication status	Published - 15 Apr 1995

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title = "Influence of annealing on the hydrogen bonding and the microstructure of diamondlike and polymerlike hydrogenated amorphous carbon films",

abstract = "The influence of hydrogen incorporation on the microstructure of hydrogenated amorphous carbon (a-C:H) films has been studied in detail by applying several complementary methods, i.e., elastic recoil detection analysis (ERDA), hydrogen evolution, and infrared absorption measurements, to two series of samples prepared by two different techniques, respectively representative of diamondlike and polymerlike a-C:H. The analysis of the changes of the infrared vibrational spectra over a large frequency range upon annealing at increasing temperatures up to 600°C allowed us to get insights into both the C-H and C-C bonding modifications.",

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AU - Bounouh, Y.

AU - Thèye, M. L.

AU - Dehbi-Alaoui, A.

AU - Matthews, A.

AU - Stoquert, J. P.

PY - 1995/4/15

Y1 - 1995/4/15

N2 - The influence of hydrogen incorporation on the microstructure of hydrogenated amorphous carbon (a-C:H) films has been studied in detail by applying several complementary methods, i.e., elastic recoil detection analysis (ERDA), hydrogen evolution, and infrared absorption measurements, to two series of samples prepared by two different techniques, respectively representative of diamondlike and polymerlike a-C:H. The analysis of the changes of the infrared vibrational spectra over a large frequency range upon annealing at increasing temperatures up to 600°C allowed us to get insights into both the C-H and C-C bonding modifications.

AB - The influence of hydrogen incorporation on the microstructure of hydrogenated amorphous carbon (a-C:H) films has been studied in detail by applying several complementary methods, i.e., elastic recoil detection analysis (ERDA), hydrogen evolution, and infrared absorption measurements, to two series of samples prepared by two different techniques, respectively representative of diamondlike and polymerlike a-C:H. The analysis of the changes of the infrared vibrational spectra over a large frequency range upon annealing at increasing temperatures up to 600°C allowed us to get insights into both the C-H and C-C bonding modifications.

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Influence of annealing on the hydrogen bonding and the microstructure of diamondlike and polymerlike hydrogenated amorphous carbon films

Abstract

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