Abstract
The effects of bias voltage on the microstructure and the related tribological properties of CrAlYNβCrN nanoscale multilayer superlattice coatings were investigated. The coatings were deposited at 450Β°C substrate temperature by combined high power impulse magnetron sputtering (HIPIMS) and unbalanced magnetron sputtering techniques. The substrates were 304 stainless steel, M2 high speed steel for structural analysis and mechanical testing, as well as cemented carbide substrates end mills for dry high speed milling applications. Substrates were pretreated by HIPIMS etching. The bias voltage ππ was varied between β75 and β150V. The chemical composition was determined by neutral mass spectroscopy. The microstructure was characterized by x-ray diffraction and cross sectional transmission electron microscopy. All coatings had a single phase π΅1 fcc structure. The chemical composition was not affected by the bias voltage. Local epitaxial or axiotaxial growth attributed to the HIPIMS etching pretreatment was observed on the large surface areas of the substrate crystals. This turned to columnar growth with {110} texture at low bias voltages ππ between β75 and β120V, while at ππ=β150V an equiaxed structure of large crystal sizes developed with {111} texture. At the same time the waviness of the superlattice significantly decreased. An increase in bias voltage resulted in a significant rise in both residual stress levels (from β3.3toβ9.5GPa) and plastic hardness (from π»π=34β51GPa), while the coating/substrate adhesion decreased from 61to45N. The friction coefficient increased from 0.43 (at ππ=β75V) to 0.55 (at ππ΅=β120V), while the initial sliding wear rates decreased remarkably (2.6Γ10β16m3Nβ1mβ1 at ππ΅=β75V to 3.7Γ10β17m3Nβ1mβ1 at ππ=β150V). The life time of 8mm ball-nosed cemented carbide end mills decreased from 39min at ππ=β75V to 19min when ππ was raised to β150V. These results highlight that the combination of HIPIMS substrate treatment and designed deposition parameters provides good opportunity to tailor coating structures with optimized properties.
Original language | English |
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Pages (from-to) | 174-182 |
Number of pages | 9 |
Journal | Journal of Vacuum Science & Technology A |
Volume | 27 |
Issue number | 2 |
Early online date | 6 Feb 2009 |
DOIs | |
Publication status | Published - Mar 2009 |
Keywords
- X-ray diffraction
- Adhesion
- Aluminium compounds
- Chromium compounds
- Coatings
- Crystal microstructure
- Etching
- Friction
- Hardness
- Internal stresses
- Mass spectroscopic chemical analysis
- Mechanical testing
- Multilayers
- Nanostructured materials
- Plasticity
- Sputter deposition
- Stainless steel
- Superlattices
- Surface texture
- Transmission electron microscopy
- Tribology
- Vapour deposited coatings
- Wear