Abstract
The interactions between inert gases and nitrogen in direct current triode discharges were discussed. It was found that for nitrogen partial pressures of less than 10%, an increase in atomic nitrogen species was absorbed for both inert gas discharges. The dissociation of nitrogen molecular species by inert gas metastables was also elaborated.
Original language | English |
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Pages (from-to) | 1683-1687 |
Number of pages | 5 |
Journal | Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films |
Volume | 21 |
Issue number | 5 |
DOIs | |
Publication status | Published - 1 Sept 2003 |
Keywords
- Atoms
- Molecules
- Nitrogen
- Pressure effects
- Triodes