Abstract
Two kinds of superlattices (i) with and (ii) without growth interrupt (GI) after deposition of 1.77 monolayers (ML) of InAs on GaAs (0 0 1) were grown by solid-source molecular beam epitaxy (MBE) and assessed by transmission electron microscopy (TEM) techniques, double crystal X-ray diffraction (DCXRD) and photoluminescence (PL) measurements in order to gain an understanding of the structural and compositional properties. In case (i) formation of coherent dislocation free self-organized quantum dots (SOQDs) with 2.8-3.2 nm height and 13-16 nm lateral size was observed, whereas in case (ii) no quantum dots had formed. In order to better understand the implication of growth interruption for the formation mechanism, highly localised assessment of the composition of the QD was carried out via atomic resolution Z-contrast imaging and electron energy loss spectroscopy (EELS). © 2008 Elsevier Ltd. All rights reserved.
Original language | English |
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Title of host publication | Microelectronics Journal|Microelectron J |
Pages | 479-482 |
Number of pages | 3 |
Volume | 40 |
DOIs | |
Publication status | Published - Mar 2009 |
Event | Workshop on Recent Advances on Low Dimensional Structures and Devices - Nottingham, ENGLAND Duration: 1 Jan 1824 → … http://<Go to ISI>://000264694700027 |
Conference
Conference | Workshop on Recent Advances on Low Dimensional Structures and Devices |
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City | Nottingham, ENGLAND |
Period | 1/01/24 → … |
Internet address |
Keywords
- EELS
- HAADF
- InAs quantum dots
- Molecular beam epitaxy