TY - JOUR
T1 - Ionization assisted physical vapor deposition of zirconia thermal barrier coatings
AU - Fancey, K. S.
AU - Matthews, A.
PY - 1986/1/1
Y1 - 1986/1/1
N2 - Yttria stabilized zirconia has been deposited by electron beam physical vapor deposition under a range of process conditions. The influence of rf plasma assistance, pressure, surface finish, and source to substrate distance on structure, phase, uniformity, and adhesion has been studied. Coatings were found to be predominantly cubic; their texture could be modified by plasma assistance. Also plasma assistance was found to improve adhesion, permit control of coating structure and densification, and provide the possibility to increase pressures, to improve coating thickness uniformity without loss of structure control. Excellent adhesion was obtained even on polished substrates at low temperatures (400 C), which when coupled with the fact that the coating tends to replicate the original surface finish, suggests that good aerodynamic efficiencies and performance should be achieved with thermal barrier coatings produced by this method.
AB - Yttria stabilized zirconia has been deposited by electron beam physical vapor deposition under a range of process conditions. The influence of rf plasma assistance, pressure, surface finish, and source to substrate distance on structure, phase, uniformity, and adhesion has been studied. Coatings were found to be predominantly cubic; their texture could be modified by plasma assistance. Also plasma assistance was found to improve adhesion, permit control of coating structure and densification, and provide the possibility to increase pressures, to improve coating thickness uniformity without loss of structure control. Excellent adhesion was obtained even on polished substrates at low temperatures (400 C), which when coupled with the fact that the coating tends to replicate the original surface finish, suggests that good aerodynamic efficiencies and performance should be achieved with thermal barrier coatings produced by this method.
UR - http://www.scopus.com/inward/record.url?scp=84875017876&partnerID=8YFLogxK
U2 - 10.1116/1.573699
DO - 10.1116/1.573699
M3 - Article
AN - SCOPUS:84875017876
SN - 0734-2101
VL - 4
SP - 2656
EP - 2660
JO - Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films
JF - Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films
IS - 6
ER -