Kinetic and Transport Modelling of the Metalorganic Chemical Vapor Deposition of InP from Trimethyl-indium and Phosphine and Comparison with Experiments

C. Theodoropoulos; N.K. Ingle; T.J. Mountziaris; Z.-Y. Chen; P.L. Liu; G. Kioseoglou; A. Petrou

Kinetic and Transport Modelling of the Metalorganic Chemical Vapor Deposition of InP from Trimethyl-indium and Phosphine and Comparison with Experiments

C. Theodoropoulos, N.K. Ingle, T.J. Mountziaris, Z.-Y. Chen, P.L. Liu, G. Kioseoglou, A. Petrou

Research output: Contribution to journal › Article › peer-review

Original language	English
Pages (from-to)	2086-2094
Journal	Journal of the Electrochemical Society
Volume	142
Publication status	Published - 1995

Cite this

@article{32cfb88878dd431aa85880e6fafe55b1,

title = "Kinetic and Transport Modelling of the Metalorganic Chemical Vapor Deposition of InP from Trimethyl-indium and Phosphine and Comparison with Experiments",

author = "C. Theodoropoulos and N.K. Ingle and T.J. Mountziaris and Z.-Y. Chen and P.L. Liu and G. Kioseoglou and A. Petrou",

year = "1995",

language = "English",

volume = "142",

pages = "2086--2094",

journal = "Journal of the Electrochemical Society",

issn = "1945-7111",

publisher = "IOP Publishing Ltd",

}

TY - JOUR

T1 - Kinetic and Transport Modelling of the Metalorganic Chemical Vapor Deposition of InP from Trimethyl-indium and Phosphine and Comparison with Experiments

AU - Theodoropoulos, C.

AU - Ingle, N.K.

AU - Mountziaris, T.J.

AU - Chen, Z.-Y.

AU - Liu, P.L.

AU - Kioseoglou, G.

AU - Petrou, A.

PY - 1995

Y1 - 1995

M3 - Article

SN - 1945-7111

VL - 142

SP - 2086

EP - 2094

JO - Journal of the Electrochemical Society

JF - Journal of the Electrochemical Society

ER -