Large area nanopatterning of silicon surface by chemical assisted laser processing using near-field enhancement by particle-lens arrays,

W. Guo, Z. B. Wang, L Li, Z. Liu

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution

Original language	English
Title of host publication	host publication
Publication status	Published - 2008
Event	PICALO conference - Beijing, China Duration: 16 Apr 2008 → 18 Apr 2008

Cite this

@inproceedings{5d005443d69d4333915f1c7a8b92475a,

title = "Large area nanopatterning of silicon surface by chemical assisted laser processing using near-field enhancement by particle-lens arrays,",

author = "W. Guo and Wang, {Z. B.} and L Li and Z. Liu",

year = "2008",

language = "English",

booktitle = "host publication",

note = "PICALO conference ; Conference date: 16-04-2008 Through 18-04-2008",

}