Large volume serial section tomography by Xe Plasma FIB dual beam microscopy

Timothy Burnett; R. Kelley; Bart Winiarski; L. Contreras; Michael Daly; Ali Gholinia; M.G. Burke; Philip Withers

doi:10.1016/j.ultramic.2015.11.001

Large volume serial section tomography by Xe Plasma FIB dual beam microscopy

Timothy Burnett, R. Kelley, Bart Winiarski, L. Contreras, Michael Daly, Ali Gholinia, M.G. Burke, Philip Withers

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Abstract

Ga+ Focused Ion Beam-Scanning Electron Microscopes (FIB-SEM) have revolutionised the level of microstructural information that can be recovered in 3D by block face serial section tomography (SST), as well as enabling the site-specific removal of smaller regions for subsequent transmission electron microscope (TEM) examination. However, Ga+ FIB material removal rates limit the volumes and depths that can be probed to dimensions in the tens of microns range. Emerging Xe+ Plasma Focused Ion Beam-Scanning Electron Microscope (PFIB-SEM) systems promise faster removal rates. Here we examine the potential of the method for large volume serial section tomography as applied to bainitic steel and WCâ€“Co hard metals. Our studies demonstrate that with careful control of milling parameters precise automated serial sectioning can be achieved with low levels of milling artefacts at removal rates some 60Ã— faster. Volumes that are hundreds of microns in dimension have been collected using fully automated SST routines in feasible timescales (

Original language	English
Pages (from-to)	119-129
Number of pages	11
Journal	Ultramicroscopy
Volume	161
Early online date	10 Nov 2015
DOIs	https://doi.org/10.1016/j.ultramic.2015.11.001
Publication status	Published - 10 Nov 2015

Keywords

Xe+ Plasma FIB-SEM dual beam microscope; Scanning electron microscopy; 3D imaging; X-ray micro-tomography (micro-CT); A508 grade 3 steel

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10.1016/j.ultramic.2015.11.001Licence: CC BY

POST-PEER-REVIEW-PUBLISHERS.PDFFinal published version, 2.15 MB

Next Generation Multi-Dimensional X-ray Imaging
Withers, P. (PI), Burke, G. (CoI), Cernik, R. (CoI), Haigh, S. (CoI), Lee, P. (CoI) & Lionheart, W. (CoI)
1/02/15 → 31/01/20
Project: Research
XRADIA : High Resolution of 4D Imaging of Degradation and Self-repair Processes
Withers, P. (PI), Bailey, C. (CoI) & Lee, P. (CoI)
1/04/12 → 31/03/22
Project: Research

Cite this

@article{a19d7b5c2c7f49ec89198ef89a349691,

title = "Large volume serial section tomography by Xe Plasma FIB dual beam microscopy",

abstract = "Ga+ Focused Ion Beam-Scanning Electron Microscopes (FIB-SEM) have revolutionised the level of microstructural information that can be recovered in 3D by block face serial section tomography (SST), as well as enabling the site-specific removal of smaller regions for subsequent transmission electron microscope (TEM) examination. However, Ga+ FIB material removal rates limit the volumes and depths that can be probed to dimensions in the tens of microns range. Emerging Xe+ Plasma Focused Ion Beam-Scanning Electron Microscope (PFIB-SEM) systems promise faster removal rates. Here we examine the potential of the method for large volume serial section tomography as applied to bainitic steel and WC{\^a}€“Co hard metals. Our studies demonstrate that with careful control of milling parameters precise automated serial sectioning can be achieved with low levels of milling artefacts at removal rates some 60{\~A}— faster. Volumes that are hundreds of microns in dimension have been collected using fully automated SST routines in feasible timescales (",

keywords = "Xe+ Plasma FIB-SEM dual beam microscope; Scanning electron microscopy; 3D imaging; X-ray micro-tomography (micro-CT); A508 grade 3 steel",

author = "Timothy Burnett and R. Kelley and Bart Winiarski and L. Contreras and Michael Daly and Ali Gholinia and M.G. Burke and Philip Withers",

note = "Open Access funded by Engineering and Physical Sciences Research Council",

year = "2015",

month = nov,

day = "10",

doi = "10.1016/j.ultramic.2015.11.001",

language = "English",

volume = "161",

pages = "119--129",

journal = "Ultramicroscopy",

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publisher = "Elsevier BV",

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TY - JOUR

T1 - Large volume serial section tomography by Xe Plasma FIB dual beam microscopy

AU - Burnett, Timothy

AU - Kelley, R.

AU - Winiarski, Bart

AU - Contreras, L.

AU - Daly, Michael

AU - Gholinia, Ali

AU - Burke, M.G.

AU - Withers, Philip

N1 - Open Access funded by Engineering and Physical Sciences Research Council

PY - 2015/11/10

Y1 - 2015/11/10

N2 - Ga+ Focused Ion Beam-Scanning Electron Microscopes (FIB-SEM) have revolutionised the level of microstructural information that can be recovered in 3D by block face serial section tomography (SST), as well as enabling the site-specific removal of smaller regions for subsequent transmission electron microscope (TEM) examination. However, Ga+ FIB material removal rates limit the volumes and depths that can be probed to dimensions in the tens of microns range. Emerging Xe+ Plasma Focused Ion Beam-Scanning Electron Microscope (PFIB-SEM) systems promise faster removal rates. Here we examine the potential of the method for large volume serial section tomography as applied to bainitic steel and WCâ€“Co hard metals. Our studies demonstrate that with careful control of milling parameters precise automated serial sectioning can be achieved with low levels of milling artefacts at removal rates some 60Ã— faster. Volumes that are hundreds of microns in dimension have been collected using fully automated SST routines in feasible timescales (

AB - Ga+ Focused Ion Beam-Scanning Electron Microscopes (FIB-SEM) have revolutionised the level of microstructural information that can be recovered in 3D by block face serial section tomography (SST), as well as enabling the site-specific removal of smaller regions for subsequent transmission electron microscope (TEM) examination. However, Ga+ FIB material removal rates limit the volumes and depths that can be probed to dimensions in the tens of microns range. Emerging Xe+ Plasma Focused Ion Beam-Scanning Electron Microscope (PFIB-SEM) systems promise faster removal rates. Here we examine the potential of the method for large volume serial section tomography as applied to bainitic steel and WCâ€“Co hard metals. Our studies demonstrate that with careful control of milling parameters precise automated serial sectioning can be achieved with low levels of milling artefacts at removal rates some 60Ã— faster. Volumes that are hundreds of microns in dimension have been collected using fully automated SST routines in feasible timescales (

KW - Xe+ Plasma FIB-SEM dual beam microscope; Scanning electron microscopy; 3D imaging; X-ray micro-tomography (micro-CT); A508 grade 3 steel

U2 - 10.1016/j.ultramic.2015.11.001

DO - 10.1016/j.ultramic.2015.11.001

M3 - Article

SN - 0304-3991

VL - 161

SP - 119

EP - 129

JO - Ultramicroscopy

JF - Ultramicroscopy

ER -

Large volume serial section tomography by Xe Plasma FIB dual beam microscopy

Abstract

Keywords

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Projects

Next Generation Multi-Dimensional X-ray Imaging

XRADIA : High Resolution of 4D Imaging of Degradation and Self-repair Processes

Cite this