Microstructure and electrical properties of the conductive Pt-LaNiO3 composite films deposited with co-sputtering

L Qiao; X F Bi

doi:10.1016/j.apsusc.2008.09.017

Microstructure and electrical properties of the conductive Pt-LaNiO3 composite films deposited with co-sputtering

L Qiao, X F Bi

Research output: Contribution to journal › Article › peer-review

Abstract

Highly conductive Pt-added LaNiO3 composite films were fabricated by radio frequency co-sputtering method. Pt content dependence of microstructure, surface condition and electrical resistivity for the films were investigated. X-ray diffraction analysis shows that the composite films maintain the (001)oriented structure until the Pt content exceeds 36.1 at.%. Increasing the Pt content will increase the film surface roughness and higher Pt content results in the Pt hillocks with (100) basal plane formation on the film surface. Transmission electron microscopy observation reveals that with increasing Pt content, dense LNO grains are broken up and tiny Pt grains begin to emerge, join each other, grow up and finally agglomerate. Electrical measurements indicate that the film resistivity is greatly reduced with Pt addition. (C) 2008 Elsevier B.V. All rights reserved.

Original language	English
Pages (from-to)	3170-3174
Number of pages	5
Journal	Applied Surface Science
Volume	255
Issue number	5
DOIs	https://doi.org/10.1016/j.apsusc.2008.09.017
Publication status	Published - 2008

Keywords

Pt-LaNiO3 composite films
Microstructure
Surface roughness
LANIO3 THIN-FILMS
ELECTRODES
GROWTH
HILLOCKS
ENERGY

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10.1016/j.apsusc.2008.09.017

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title = "Microstructure and electrical properties of the conductive Pt-LaNiO3 composite films deposited with co-sputtering",

abstract = "Highly conductive Pt-added LaNiO3 composite films were fabricated by radio frequency co-sputtering method. Pt content dependence of microstructure, surface condition and electrical resistivity for the films were investigated. X-ray diffraction analysis shows that the composite films maintain the (001)oriented structure until the Pt content exceeds 36.1 at.%. Increasing the Pt content will increase the film surface roughness and higher Pt content results in the Pt hillocks with (100) basal plane formation on the film surface. Transmission electron microscopy observation reveals that with increasing Pt content, dense LNO grains are broken up and tiny Pt grains begin to emerge, join each other, grow up and finally agglomerate. Electrical measurements indicate that the film resistivity is greatly reduced with Pt addition. (C) 2008 Elsevier B.V. All rights reserved.",

keywords = "Pt-LaNiO3 composite films, Microstructure, Surface roughness, LANIO3 THIN-FILMS, ELECTRODES, GROWTH, HILLOCKS, ENERGY",

author = "L Qiao and Bi, {X F}",

note = "ISI Document Delivery No.: 378CR Times Cited: 0 Cited Reference Count: 21 Qiao, Liang Bi, Xiaofang ELSEVIER SCIENCE BV Part 2",

year = "2008",

doi = "10.1016/j.apsusc.2008.09.017",

language = "English",

volume = "255",

pages = "3170--3174",

journal = "Applied Surface Science",

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TY - JOUR

T1 - Microstructure and electrical properties of the conductive Pt-LaNiO3 composite films deposited with co-sputtering

AU - Qiao, L

AU - Bi, X F

N1 - ISI Document Delivery No.: 378CR Times Cited: 0 Cited Reference Count: 21 Qiao, Liang Bi, Xiaofang ELSEVIER SCIENCE BV Part 2

PY - 2008

Y1 - 2008

N2 - Highly conductive Pt-added LaNiO3 composite films were fabricated by radio frequency co-sputtering method. Pt content dependence of microstructure, surface condition and electrical resistivity for the films were investigated. X-ray diffraction analysis shows that the composite films maintain the (001)oriented structure until the Pt content exceeds 36.1 at.%. Increasing the Pt content will increase the film surface roughness and higher Pt content results in the Pt hillocks with (100) basal plane formation on the film surface. Transmission electron microscopy observation reveals that with increasing Pt content, dense LNO grains are broken up and tiny Pt grains begin to emerge, join each other, grow up and finally agglomerate. Electrical measurements indicate that the film resistivity is greatly reduced with Pt addition. (C) 2008 Elsevier B.V. All rights reserved.

AB - Highly conductive Pt-added LaNiO3 composite films were fabricated by radio frequency co-sputtering method. Pt content dependence of microstructure, surface condition and electrical resistivity for the films were investigated. X-ray diffraction analysis shows that the composite films maintain the (001)oriented structure until the Pt content exceeds 36.1 at.%. Increasing the Pt content will increase the film surface roughness and higher Pt content results in the Pt hillocks with (100) basal plane formation on the film surface. Transmission electron microscopy observation reveals that with increasing Pt content, dense LNO grains are broken up and tiny Pt grains begin to emerge, join each other, grow up and finally agglomerate. Electrical measurements indicate that the film resistivity is greatly reduced with Pt addition. (C) 2008 Elsevier B.V. All rights reserved.

KW - Pt-LaNiO3 composite films

KW - Microstructure

KW - Surface roughness

KW - LANIO3 THIN-FILMS

KW - ELECTRODES

KW - GROWTH

KW - HILLOCKS

KW - ENERGY

U2 - 10.1016/j.apsusc.2008.09.017

DO - 10.1016/j.apsusc.2008.09.017

M3 - Article

VL - 255

SP - 3170

EP - 3174

JO - Applied Surface Science

JF - Applied Surface Science

IS - 5

ER -

Microstructure and electrical properties of the conductive Pt-LaNiO3 composite films deposited with co-sputtering

Abstract

Keywords

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