TY - JOUR
T1 - Miniaturized SIW Bandpass Filter Based on TSV Technology for THz Applications
AU - Wang, Fengjuan
AU - Pavlidis, Vasilis
AU - Yu, Ningmei
PY - 2020
Y1 - 2020
N2 - A miniaturized substrate integrated waveguide (SIW) bandpass filter with an area of 0.682×0.210 mm2 is proposed based on Through-Silicon Via (TSV) technology for terahertz (THz) applications. The design method of the THz cavity filter based on rectangular TSV is introduced and the filtering characteristics are investigated by the finite element method (FEM) and mode matching method (MMM). The rectangular TSV is substituted by cylindrical structures and the THz cavity filter is fabricated and measured in order to investigate the possibility of integration with typical 3D IC manufacturing processes. The cavity filter utilizing cylindrical TSV exhibits a bandwidth of 0.051 THz centered at 0.331 THz, an insertion loss of 1.5 dB, and a reflection of higher than 15 dB in the passband.
AB - A miniaturized substrate integrated waveguide (SIW) bandpass filter with an area of 0.682×0.210 mm2 is proposed based on Through-Silicon Via (TSV) technology for terahertz (THz) applications. The design method of the THz cavity filter based on rectangular TSV is introduced and the filtering characteristics are investigated by the finite element method (FEM) and mode matching method (MMM). The rectangular TSV is substituted by cylindrical structures and the THz cavity filter is fabricated and measured in order to investigate the possibility of integration with typical 3D IC manufacturing processes. The cavity filter utilizing cylindrical TSV exhibits a bandwidth of 0.051 THz centered at 0.331 THz, an insertion loss of 1.5 dB, and a reflection of higher than 15 dB in the passband.
U2 - 10.1109/TTHZ.2020.2974091
DO - 10.1109/TTHZ.2020.2974091
M3 - Article
SN - 2156-342X
JO - IEEE Transactions on Terahertz Science and Technology
JF - IEEE Transactions on Terahertz Science and Technology
ER -