Nanolithography and manipulation of graphene using an atomic force microscope

A. J M Giesbers; U. Zeitler; S. Neubeck; F. Freitag; K. S. Novoselov; J. C. Maan

doi:10.1016/j.ssc.2008.06.027

Nanolithography and manipulation of graphene using an atomic force microscope

A. J M Giesbers, U. Zeitler, S. Neubeck, F. Freitag, K. S. Novoselov, J. C. Maan

Research output: Contribution to journal › Article › peer-review

Abstract

We use an atomic force microscope (AFM) to manipulate graphene films on a nanoscopic length scale. By means of local anodic oxidation with an AFM we are able to structure isolating trenches into single-layer and few-layer graphene flakes, opening the possibility of tabletop graphene based device fabrication. Trench sizes of less than 30 nm in width are attainable with this technique. Besides oxidation we also show the influence of mechanical peeling and scratching with an AFM of few layer graphene sheets placed on different substrates. © 2008 Elsevier Ltd. All rights reserved.

Original language	English
Pages (from-to)	366-369
Number of pages	3
Journal	Solid State Communications
Volume	147
Issue number	9-10
DOIs	https://doi.org/10.1016/j.ssc.2008.06.027
Publication status	Published - Sept 2008

Keywords

A. Graphene
E. Atomic force microscopy
E. Nanolithography

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10.1016/j.ssc.2008.06.027

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title = "Nanolithography and manipulation of graphene using an atomic force microscope",

abstract = "We use an atomic force microscope (AFM) to manipulate graphene films on a nanoscopic length scale. By means of local anodic oxidation with an AFM we are able to structure isolating trenches into single-layer and few-layer graphene flakes, opening the possibility of tabletop graphene based device fabrication. Trench sizes of less than 30 nm in width are attainable with this technique. Besides oxidation we also show the influence of mechanical peeling and scratching with an AFM of few layer graphene sheets placed on different substrates. {\textcopyright} 2008 Elsevier Ltd. All rights reserved.",

keywords = "A. Graphene, E. Atomic force microscopy, E. Nanolithography",

author = "Giesbers, {A. J M} and U. Zeitler and S. Neubeck and F. Freitag and Novoselov, {K. S.} and Maan, {J. C.}",

year = "2008",

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doi = "10.1016/j.ssc.2008.06.027",

language = "English",

volume = "147",

pages = "366--369",

journal = "Solid State Communications",

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TY - JOUR

T1 - Nanolithography and manipulation of graphene using an atomic force microscope

AU - Giesbers, A. J M

AU - Zeitler, U.

AU - Neubeck, S.

AU - Freitag, F.

AU - Novoselov, K. S.

AU - Maan, J. C.

PY - 2008/9

Y1 - 2008/9

N2 - We use an atomic force microscope (AFM) to manipulate graphene films on a nanoscopic length scale. By means of local anodic oxidation with an AFM we are able to structure isolating trenches into single-layer and few-layer graphene flakes, opening the possibility of tabletop graphene based device fabrication. Trench sizes of less than 30 nm in width are attainable with this technique. Besides oxidation we also show the influence of mechanical peeling and scratching with an AFM of few layer graphene sheets placed on different substrates. © 2008 Elsevier Ltd. All rights reserved.

AB - We use an atomic force microscope (AFM) to manipulate graphene films on a nanoscopic length scale. By means of local anodic oxidation with an AFM we are able to structure isolating trenches into single-layer and few-layer graphene flakes, opening the possibility of tabletop graphene based device fabrication. Trench sizes of less than 30 nm in width are attainable with this technique. Besides oxidation we also show the influence of mechanical peeling and scratching with an AFM of few layer graphene sheets placed on different substrates. © 2008 Elsevier Ltd. All rights reserved.

KW - A. Graphene

KW - E. Atomic force microscopy

KW - E. Nanolithography

U2 - 10.1016/j.ssc.2008.06.027

DO - 10.1016/j.ssc.2008.06.027

M3 - Article

SN - 0038-1098

VL - 147

SP - 366

EP - 369

JO - Solid State Communications

JF - Solid State Communications

IS - 9-10

ER -

Nanolithography and manipulation of graphene using an atomic force microscope

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Keywords

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