Nanometre scale 3D nanomechanical imaging of semiconductor structures from few nm to sub-micrometre depths

O. V. Kolosov, F. Dinelli, A. Robson, A. Krier, M. Hayne, V. I. Fal'Ko, M. Henini

    Research output: Chapter in Book/Report/Conference proceedingConference contributionpeer-review

    Abstract

    Multilayer structures of active semiconductor devices (1), novel memories (2) and semiconductor interconnects are becoming increasingly three-dimensional (3D) with simultaneous decrease of dimensions down to the few nanometres length scale (3). Ability to test and explore these 3D nanostructures with nanoscale resolution is vital for the optimization of their operation and improving manufacturing processes of new semiconductor devices. While electron and scanning probe microscopes (SPMs) can provide necessary lateral resolution, their ability to probe underneath the immediate surface is severely limited. Cross-sectioning of the structures via focused ion beam (FIB) to expose the subsurface areas often introduces multiple artefacts that mask the true features of the hidden structures, negating benefits of such approach. In addition, the few tens of micrometre dimension of FIB cut, make it unusable for the SPM investigation.

    Original languageEnglish
    Title of host publication2015 IEEE International Interconnect Technology Conference and 2015 IEEE Materials for Advanced Metallization Conference, IITC/MAM 2015
    PublisherIEEE
    Pages43-45
    Number of pages3
    ISBN (Electronic)9781467373562
    DOIs
    Publication statusPublished - 10 Nov 2015
    EventIEEE International Interconnect Technology Conference and 2015 IEEE Materials for Advanced Metallization Conference, IITC/MAM 2015 - Grenoble, France
    Duration: 18 May 201521 May 2015

    Conference

    ConferenceIEEE International Interconnect Technology Conference and 2015 IEEE Materials for Advanced Metallization Conference, IITC/MAM 2015
    Country/TerritoryFrance
    CityGrenoble
    Period18/05/1521/05/15

    Keywords

    • Acoustics
    • Astronomy
    • Atomic layer deposition
    • Decision support systems
    • Gallium arsenide
    • Vibrations

    Research Beacons, Institutes and Platforms

    • National Graphene Institute

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