Nanoscale dielectric microscopy of non-planar samples by lift-mode electrostatic force microscopy

M. Van Der Hofstadt; R. Fabregas; M. C. Biagi; L. Fumagalli; G. Gomila

doi:10.1088/0957-4484/27/40/405706

Nanoscale dielectric microscopy of non-planar samples by lift-mode electrostatic force microscopy

M. Van Der Hofstadt, R. Fabregas, M. C. Biagi, L. Fumagalli, G. Gomila

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Abstract

Lift-mode electrostatic force microscopy (EFM) is one of the most convenient imaging modes to study the local dielectric properties of non-planar samples. Here we present the quantitative analysis of this imaging mode. We introduce a method to quantify and subtract the topographic crosstalk from the lift-mode EFM images, and a 3D numerical approach that allows for extracting the local dielectric constant with nanoscale spatial resolution free from topographic artifacts. We demonstrate this procedure by measuring the dielectric properties of micropatterned SiO₂ pillars and of single bacteria cells, thus illustrating the wide applicability of our approach from materials science to biology.

Original language	English
Article number	405706
Journal	Nanotechnology
Volume	27
Issue number	40
Early online date	6 Sept 2016
DOIs	https://doi.org/10.1088/0957-4484/27/40/405706
Publication status	Published - 6 Sept 2016

Keywords

AFM
dielectric constant
dielectrics
EFM
non-planar surfaces

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10.1088/0957-4484/27/40/405706

Nanotechnology_2016_AcceptedAccepted author manuscript, 1.62 MB

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title = "Nanoscale dielectric microscopy of non-planar samples by lift-mode electrostatic force microscopy",

abstract = "Lift-mode electrostatic force microscopy (EFM) is one of the most convenient imaging modes to study the local dielectric properties of non-planar samples. Here we present the quantitative analysis of this imaging mode. We introduce a method to quantify and subtract the topographic crosstalk from the lift-mode EFM images, and a 3D numerical approach that allows for extracting the local dielectric constant with nanoscale spatial resolution free from topographic artifacts. We demonstrate this procedure by measuring the dielectric properties of micropatterned SiO2 pillars and of single bacteria cells, thus illustrating the wide applicability of our approach from materials science to biology.",

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AU - Van Der Hofstadt, M.

AU - Fabregas, R.

AU - Biagi, M. C.

AU - Fumagalli, L.

AU - Gomila, G.

PY - 2016/9/6

Y1 - 2016/9/6

N2 - Lift-mode electrostatic force microscopy (EFM) is one of the most convenient imaging modes to study the local dielectric properties of non-planar samples. Here we present the quantitative analysis of this imaging mode. We introduce a method to quantify and subtract the topographic crosstalk from the lift-mode EFM images, and a 3D numerical approach that allows for extracting the local dielectric constant with nanoscale spatial resolution free from topographic artifacts. We demonstrate this procedure by measuring the dielectric properties of micropatterned SiO2 pillars and of single bacteria cells, thus illustrating the wide applicability of our approach from materials science to biology.

AB - Lift-mode electrostatic force microscopy (EFM) is one of the most convenient imaging modes to study the local dielectric properties of non-planar samples. Here we present the quantitative analysis of this imaging mode. We introduce a method to quantify and subtract the topographic crosstalk from the lift-mode EFM images, and a 3D numerical approach that allows for extracting the local dielectric constant with nanoscale spatial resolution free from topographic artifacts. We demonstrate this procedure by measuring the dielectric properties of micropatterned SiO2 pillars and of single bacteria cells, thus illustrating the wide applicability of our approach from materials science to biology.

KW - AFM

KW - dielectric constant

KW - dielectrics

KW - EFM

KW - non-planar surfaces

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Nanoscale dielectric microscopy of non-planar samples by lift-mode electrostatic force microscopy

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Keywords

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