Nanoscale perpendicular magnetic island arrays fabricated by extreme ultraviolet interference lithography

F. Luo; L. J. Heyderman; H. H. Solak; T. Thomson; M. E. Best

doi:10.1063/1.2841821

Nanoscale perpendicular magnetic island arrays fabricated by extreme ultraviolet interference lithography

F. Luo, L. J. Heyderman, H. H. Solak, T. Thomson, M. E. Best

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Abstract

Magnetic island arrays with a period of 50 nm and uniform over 20×20 μ m2 have been fabricated by depositing CoPd multilayer films on prepatterned Si Ox pillars produced by extreme ultraviolet interference lithography. Scanning electron microscopy and magnetic force microscopy measurements made on the same islands give a direct, island-by-island comparison of the size and remanent switching field. The results demonstrate that the switching field distribution (SFD) is not primarily due to magnetostatic interactions, and a strong dependence of SFD on size is also not observed, indicating that a distribution of material properties is likely to be responsible for the SFD. © 2008 American Institute of Physics.

Original language	English
Article number	102505
Journal	Applied Physics Letters
Volume	92
Issue number	10
DOIs	https://doi.org/10.1063/1.2841821
Publication status	Published - 2008

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10.1063/1.2841821

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@article{718018cadf5d49dd830b4985d9659a95,

title = "Nanoscale perpendicular magnetic island arrays fabricated by extreme ultraviolet interference lithography",

abstract = "Magnetic island arrays with a period of 50 nm and uniform over 20×20 μ m2 have been fabricated by depositing CoPd multilayer films on prepatterned Si Ox pillars produced by extreme ultraviolet interference lithography. Scanning electron microscopy and magnetic force microscopy measurements made on the same islands give a direct, island-by-island comparison of the size and remanent switching field. The results demonstrate that the switching field distribution (SFD) is not primarily due to magnetostatic interactions, and a strong dependence of SFD on size is also not observed, indicating that a distribution of material properties is likely to be responsible for the SFD. {\textcopyright} 2008 American Institute of Physics.",

author = "F. Luo and Heyderman, {L. J.} and Solak, {H. H.} and T. Thomson and Best, {M. E.}",

note = "Luo, F. Heyderman, L. J. Solak, H. H. Thomson, T. Best, M. E.",

year = "2008",

doi = "10.1063/1.2841821",

language = "English",

volume = "92",

journal = "Applied Physics Letters",

issn = "0003-6951",

publisher = "American Institute of Physics",

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TY - JOUR

T1 - Nanoscale perpendicular magnetic island arrays fabricated by extreme ultraviolet interference lithography

AU - Luo, F.

AU - Heyderman, L. J.

AU - Solak, H. H.

AU - Thomson, T.

AU - Best, M. E.

N1 - Luo, F. Heyderman, L. J. Solak, H. H. Thomson, T. Best, M. E.

PY - 2008

Y1 - 2008

N2 - Magnetic island arrays with a period of 50 nm and uniform over 20×20 μ m2 have been fabricated by depositing CoPd multilayer films on prepatterned Si Ox pillars produced by extreme ultraviolet interference lithography. Scanning electron microscopy and magnetic force microscopy measurements made on the same islands give a direct, island-by-island comparison of the size and remanent switching field. The results demonstrate that the switching field distribution (SFD) is not primarily due to magnetostatic interactions, and a strong dependence of SFD on size is also not observed, indicating that a distribution of material properties is likely to be responsible for the SFD. © 2008 American Institute of Physics.

AB - Magnetic island arrays with a period of 50 nm and uniform over 20×20 μ m2 have been fabricated by depositing CoPd multilayer films on prepatterned Si Ox pillars produced by extreme ultraviolet interference lithography. Scanning electron microscopy and magnetic force microscopy measurements made on the same islands give a direct, island-by-island comparison of the size and remanent switching field. The results demonstrate that the switching field distribution (SFD) is not primarily due to magnetostatic interactions, and a strong dependence of SFD on size is also not observed, indicating that a distribution of material properties is likely to be responsible for the SFD. © 2008 American Institute of Physics.

U2 - 10.1063/1.2841821

DO - 10.1063/1.2841821

M3 - Article

SN - 0003-6951

VL - 92

JO - Applied Physics Letters

JF - Applied Physics Letters

IS - 10

M1 - 102505

ER -

Nanoscale perpendicular magnetic island arrays fabricated by extreme ultraviolet interference lithography

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