Nonstoichiometric material transfer in the pulsed laser deposition of LaAlO3

T C Droubay; L Qiao; T C Kaspar; M H Engelhard; V Shutthanandan; S A Chambers

doi:124105 10.1063/1.3487778

Nonstoichiometric material transfer in the pulsed laser deposition of LaAlO3

T C Droubay
, L Qiao
, T C Kaspar
, M H Engelhard
, V Shutthanandan
, S A Chambers

Research output: Contribution to journal › Article › peer-review

Abstract

Inequivalent angular distributions have been found for La and Al in the ablation plume from LaAlO3 single crystal targets using a KrF laser during pulsed laser deposition. Angular distributions and stoichiometries in the condensate were measured and reveal decidedly nonstoichiometric transfer from target to substrate over most of the angular range. Composition varied dramatically for plume angles parallel to the long axis of the laser spot with the on-axis position exhibiting a peak in the La/Al atom ratio at similar to 1.5. The distributions were more diffuse in the perpendicular direction. Stoichiometric LaAlO3 was found in the condensate only at an extreme off-axis position. (C) 2010 American Institute of Physics. [doi:10.1063/1.3487778]

Original language	English
Journal	Applied Physics Letters
Volume	97
Issue number	12
DOIs	https://doi.org/124105 10.1063/1.3487778
Publication status	Published - 2010

Keywords

lanthanum compounds
pulsed laser deposition
Rutherford
backscattering
stoichiometry
X-ray photoelectron spectra
accelerated expansion
angular-distribution
ablated materials
solid-surface
film growth
thin-films
diagnostics
gases

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124105 10.1063/1.3487778

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@article{62c5a34aa0b04da18b7309814a34cb3e,

title = "Nonstoichiometric material transfer in the pulsed laser deposition of LaAlO3",

abstract = "Inequivalent angular distributions have been found for La and Al in the ablation plume from LaAlO3 single crystal targets using a KrF laser during pulsed laser deposition. Angular distributions and stoichiometries in the condensate were measured and reveal decidedly nonstoichiometric transfer from target to substrate over most of the angular range. Composition varied dramatically for plume angles parallel to the long axis of the laser spot with the on-axis position exhibiting a peak in the La/Al atom ratio at similar to 1.5. The distributions were more diffuse in the perpendicular direction. Stoichiometric LaAlO3 was found in the condensate only at an extreme off-axis position. (C) 2010 American Institute of Physics. [doi:10.1063/1.3487778]",

keywords = "lanthanum compounds, pulsed laser deposition, Rutherford, backscattering, stoichiometry, X-ray photoelectron spectra, accelerated expansion, angular-distribution, ablated materials, solid-surface, film growth, thin-films, diagnostics, gases",

author = "Droubay, \{T C\} and L Qiao and Kaspar, \{T C\} and Engelhard, \{M H\} and V Shutthanandan and Chambers, \{S A\}",

note = "ISI Document Delivery No.: 653VC Times Cited: 1 Cited Reference Count: 22 Droubay, T. C. Qiao, L. Kaspar, T. C. Engelhard, M. H. Shutthanandan, V. Chambers, S. A. U.S. Department of Energy, Office of Science, Division of Materials Sciences and Engineering ; Department of Energy's Office of Biological and Environmental Research at Pacific Northwest National Laboratory This work was supported by the U.S. Department of Energy, Office of Science, Division of Materials Sciences and Engineering and was performed using EMSL, a national scientific user facility sponsored by the Department of Energy's Office of Biological and Environmental Research and located at Pacific Northwest National Laboratory. Amer inst physics Melville",

year = "2010",

doi = "124105 10.1063/1.3487778",

language = "English",

volume = "97",

journal = "Applied Physics Letters",

publisher = "American Institute of Physics",

number = "12",

}

TY - JOUR

T1 - Nonstoichiometric material transfer in the pulsed laser deposition of LaAlO3

AU - Droubay, T C

AU - Qiao, L

AU - Kaspar, T C

AU - Engelhard, M H

AU - Shutthanandan, V

AU - Chambers, S A

N1 - ISI Document Delivery No.: 653VC Times Cited: 1 Cited Reference Count: 22 Droubay, T. C. Qiao, L. Kaspar, T. C. Engelhard, M. H. Shutthanandan, V. Chambers, S. A. U.S. Department of Energy, Office of Science, Division of Materials Sciences and Engineering ; Department of Energy's Office of Biological and Environmental Research at Pacific Northwest National Laboratory This work was supported by the U.S. Department of Energy, Office of Science, Division of Materials Sciences and Engineering and was performed using EMSL, a national scientific user facility sponsored by the Department of Energy's Office of Biological and Environmental Research and located at Pacific Northwest National Laboratory. Amer inst physics Melville

PY - 2010

Y1 - 2010

N2 - Inequivalent angular distributions have been found for La and Al in the ablation plume from LaAlO3 single crystal targets using a KrF laser during pulsed laser deposition. Angular distributions and stoichiometries in the condensate were measured and reveal decidedly nonstoichiometric transfer from target to substrate over most of the angular range. Composition varied dramatically for plume angles parallel to the long axis of the laser spot with the on-axis position exhibiting a peak in the La/Al atom ratio at similar to 1.5. The distributions were more diffuse in the perpendicular direction. Stoichiometric LaAlO3 was found in the condensate only at an extreme off-axis position. (C) 2010 American Institute of Physics. [doi:10.1063/1.3487778]

AB - Inequivalent angular distributions have been found for La and Al in the ablation plume from LaAlO3 single crystal targets using a KrF laser during pulsed laser deposition. Angular distributions and stoichiometries in the condensate were measured and reveal decidedly nonstoichiometric transfer from target to substrate over most of the angular range. Composition varied dramatically for plume angles parallel to the long axis of the laser spot with the on-axis position exhibiting a peak in the La/Al atom ratio at similar to 1.5. The distributions were more diffuse in the perpendicular direction. Stoichiometric LaAlO3 was found in the condensate only at an extreme off-axis position. (C) 2010 American Institute of Physics. [doi:10.1063/1.3487778]

KW - lanthanum compounds

KW - pulsed laser deposition

KW - Rutherford

KW - backscattering

KW - stoichiometry

KW - X-ray photoelectron spectra

KW - accelerated expansion

KW - angular-distribution

KW - ablated materials

KW - solid-surface

KW - film growth

KW - thin-films

KW - diagnostics

KW - gases

U2 - 124105 10.1063/1.3487778

DO - 124105 10.1063/1.3487778

M3 - Article

VL - 97

JO - Applied Physics Letters

JF - Applied Physics Letters

IS - 12

ER -

Nonstoichiometric material transfer in the pulsed laser deposition of LaAlO3

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Keywords

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