Optimal design of gas inlets for stagnation flow MOVPE reactors

Constantinos Theodoropoulos; R. P. Pawlowski; T.J. Mountziaris

Optimal design of gas inlets for stagnation flow MOVPE reactors

Constantinos Theodoropoulos, R. P. Pawlowski, T.J. Mountziaris

Research output: Chapter in Book/Conference proceeding › Conference contribution › peer-review

Original language	English
Title of host publication	PROCEEDINGS OF THE SECOND INTERNATIONAL SYMPOSIUM ON PROCESS CONTROL, DIAGNOSTICS, AND MODELING IN SEMICONDUCTOR MANUFACTURING
Editors	M Meyyappan, D J Economou, S W Butler
Publisher	Electrochemical Society
Pages	300-307
Number of pages	8
Volume	97
ISBN (Print)	1-56677-136-6
Publication status	Published - 1997
Event	2nd International Symposium on Control, Diagnostics and Modeling in Semiconductor Manufacturing, at the 191st Meeting of the Electrochemical-Society - Montreal, Canada Duration: 1 Jan 1824 → …

Publication series

Name	ELECTROCHEMICAL SOCIETY SERIES

Conference

Conference	2nd International Symposium on Control, Diagnostics and Modeling in Semiconductor Manufacturing, at the 191st Meeting of the Electrochemical-Society
City	Montreal, Canada
Period	1/01/24 → …

Cite this

Theodoropoulos, C., Pawlowski, R. P., & Mountziaris, T. J. (1997). Optimal design of gas inlets for stagnation flow MOVPE reactors. In M. Meyyappan, D. J. Economou, & S. W. Butler (Eds.), PROCEEDINGS OF THE SECOND INTERNATIONAL SYMPOSIUM ON PROCESS CONTROL, DIAGNOSTICS, AND MODELING IN SEMICONDUCTOR MANUFACTURING (Vol. 97, pp. 300-307). (ELECTROCHEMICAL SOCIETY SERIES). Electrochemical Society.

Theodoropoulos, Constantinos ; Pawlowski, R. P. ; Mountziaris, T.J. / Optimal design of gas inlets for stagnation flow MOVPE reactors. PROCEEDINGS OF THE SECOND INTERNATIONAL SYMPOSIUM ON PROCESS CONTROL, DIAGNOSTICS, AND MODELING IN SEMICONDUCTOR MANUFACTURING. editor / M Meyyappan ; D J Economou ; S W Butler. Vol. 97 Electrochemical Society, 1997. pp. 300-307 (ELECTROCHEMICAL SOCIETY SERIES).

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title = "Optimal design of gas inlets for stagnation flow MOVPE reactors",

author = "Constantinos Theodoropoulos and Pawlowski, {R. P.} and T.J. Mountziaris",

year = "1997",

language = "English",

isbn = "1-56677-136-6",

volume = "97",

series = "ELECTROCHEMICAL SOCIETY SERIES",

publisher = "Electrochemical Society",

pages = "300--307",

editor = "M Meyyappan and Economou, {D J} and Butler, {S W}",

booktitle = "PROCEEDINGS OF THE SECOND INTERNATIONAL SYMPOSIUM ON PROCESS CONTROL, DIAGNOSTICS, AND MODELING IN SEMICONDUCTOR MANUFACTURING",

address = "United States",

note = "2nd International Symposium on Control, Diagnostics and Modeling in Semiconductor Manufacturing, at the 191st Meeting of the Electrochemical-Society ; Conference date: 01-01-1824",

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Theodoropoulos, C, Pawlowski, RP & Mountziaris, TJ 1997, Optimal design of gas inlets for stagnation flow MOVPE reactors. in M Meyyappan, DJ Economou & SW Butler (eds), PROCEEDINGS OF THE SECOND INTERNATIONAL SYMPOSIUM ON PROCESS CONTROL, DIAGNOSTICS, AND MODELING IN SEMICONDUCTOR MANUFACTURING. vol. 97, ELECTROCHEMICAL SOCIETY SERIES, Electrochemical Society, pp. 300-307, 2nd International Symposium on Control, Diagnostics and Modeling in Semiconductor Manufacturing, at the 191st Meeting of the Electrochemical-Society, Montreal, Canada, 1/01/24.

Optimal design of gas inlets for stagnation flow MOVPE reactors. / Theodoropoulos, Constantinos; Pawlowski, R. P.; Mountziaris, T.J.
PROCEEDINGS OF THE SECOND INTERNATIONAL SYMPOSIUM ON PROCESS CONTROL, DIAGNOSTICS, AND MODELING IN SEMICONDUCTOR MANUFACTURING. ed. / M Meyyappan; D J Economou; S W Butler. Vol. 97 Electrochemical Society, 1997. p. 300-307 (ELECTROCHEMICAL SOCIETY SERIES).

Research output: Chapter in Book/Conference proceeding › Conference contribution › peer-review

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T1 - Optimal design of gas inlets for stagnation flow MOVPE reactors

AU - Theodoropoulos, Constantinos

AU - Pawlowski, R. P.

AU - Mountziaris, T.J.

PY - 1997

Y1 - 1997

M3 - Conference contribution

SN - 1-56677-136-6

VL - 97

T3 - ELECTROCHEMICAL SOCIETY SERIES

SP - 300

EP - 307

BT - PROCEEDINGS OF THE SECOND INTERNATIONAL SYMPOSIUM ON PROCESS CONTROL, DIAGNOSTICS, AND MODELING IN SEMICONDUCTOR MANUFACTURING

A2 - Meyyappan, M

A2 - Economou, D J

A2 - Butler, S W

PB - Electrochemical Society

T2 - 2nd International Symposium on Control, Diagnostics and Modeling in Semiconductor Manufacturing, at the 191st Meeting of the Electrochemical-Society

Y2 - 1 January 1824

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Theodoropoulos C, Pawlowski RP, Mountziaris TJ. Optimal design of gas inlets for stagnation flow MOVPE reactors. In Meyyappan M, Economou DJ, Butler SW, editors, PROCEEDINGS OF THE SECOND INTERNATIONAL SYMPOSIUM ON PROCESS CONTROL, DIAGNOSTICS, AND MODELING IN SEMICONDUCTOR MANUFACTURING. Vol. 97. Electrochemical Society. 1997. p. 300-307. (ELECTROCHEMICAL SOCIETY SERIES).