Optimal design of gas inlets for stagnation flow MOVPE reactors

Constantinos Theodoropoulos, R. P. Pawlowski, T.J. Mountziaris

    Research output: Chapter in Book/Report/Conference proceedingConference contributionpeer-review

    Original languageEnglish
    Title of host publicationPROCEEDINGS OF THE SECOND INTERNATIONAL SYMPOSIUM ON PROCESS CONTROL, DIAGNOSTICS, AND MODELING IN SEMICONDUCTOR MANUFACTURING
    EditorsM Meyyappan, D J Economou, S W Butler
    PublisherElectrochemical Society
    Pages300-307
    Number of pages8
    Volume97
    ISBN (Print)1-56677-136-6
    Publication statusPublished - 1997
    Event2nd International Symposium on Control, Diagnostics and Modeling in Semiconductor Manufacturing, at the 191st Meeting of the Electrochemical-Society - Montreal, Canada
    Duration: 1 Jan 1824 → …

    Publication series

    NameELECTROCHEMICAL SOCIETY SERIES

    Conference

    Conference2nd International Symposium on Control, Diagnostics and Modeling in Semiconductor Manufacturing, at the 191st Meeting of the Electrochemical-Society
    CityMontreal, Canada
    Period1/01/24 → …

    Cite this