Parallel nanostructuring of GeSbTe film with particle mask

Zengbo Wang; Z. B. Wang; M. H. Hong; B. S. Lukyanchuk; S. M. Huang; Q. F. Wang; L. P. Shi; T. C. Chong

doi:10.1007/s00339-004-2860-2

Parallel nanostructuring of GeSbTe film with particle mask

Zengbo Wang
, Z. B. Wang
, M. H. Hong
, B. S. Lukyanchuk
, S. M. Huang
, Q. F. Wang
, L. P. Shi
, T. C. Chong

Research output: Contribution to journal › Article › peer-review

Abstract

Parallel nanostructuring of a GeSbTe film may significantly improve the recording performance in data storage. In this paper, a method that permits direct and massively parallel nanopatterning of the substrate surface by laser irradiation is investigated. Polystyrene spherical particles were deposited on the surface in a monolayer array by self-assembly, The array was then irradiated with a 248-nm KrF laser. A sub-micron nanodent array can be obtained after single-pulse irradiation. These nanodents change their shapes at different laser energies. The optical near-field distribution around the particles was calculated according to the exact solution of the light-scattering problem. The influence of the presence of the substrate on the optical near field was also studied. The mechanisms for the generation of the nanodent structures are discussed.

Original language	English
Pages (from-to)	1603-1606
Number of pages	3
Journal	Applied Physics A: Materials Science and Processing
Volume	79
Issue number	4-6
DOIs	https://doi.org/10.1007/s00339-004-2860-2
Publication status	Published - Sept 2004

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@article{de04db3ddfa945bfb93a50b59b0c547d,

title = "Parallel nanostructuring of GeSbTe film with particle mask",

abstract = "Parallel nanostructuring of a GeSbTe film may significantly improve the recording performance in data storage. In this paper, a method that permits direct and massively parallel nanopatterning of the substrate surface by laser irradiation is investigated. Polystyrene spherical particles were deposited on the surface in a monolayer array by self-assembly, The array was then irradiated with a 248-nm KrF laser. A sub-micron nanodent array can be obtained after single-pulse irradiation. These nanodents change their shapes at different laser energies. The optical near-field distribution around the particles was calculated according to the exact solution of the light-scattering problem. The influence of the presence of the substrate on the optical near field was also studied. The mechanisms for the generation of the nanodent structures are discussed.",

author = "Zengbo Wang and Wang, \{Z. B.\} and Hong, \{M. H.\} and Lukyanchuk, \{B. S.\} and Huang, \{S. M.\} and Wang, \{Q. F.\} and Shi, \{L. P.\} and Chong, \{T. C.\}",

year = "2004",

month = sep,

doi = "10.1007/s00339-004-2860-2",

language = "English",

volume = "79",

pages = "1603--1606",

journal = "Applied Physics A: Materials Science and Processing",

issn = "1432-0630",

publisher = "Springer Heidelberg",

number = "4-6",

}

TY - JOUR

T1 - Parallel nanostructuring of GeSbTe film with particle mask

AU - Wang, Zengbo

AU - Wang, Z. B.

AU - Hong, M. H.

AU - Lukyanchuk, B. S.

AU - Huang, S. M.

AU - Wang, Q. F.

AU - Shi, L. P.

AU - Chong, T. C.

PY - 2004/9

Y1 - 2004/9

N2 - Parallel nanostructuring of a GeSbTe film may significantly improve the recording performance in data storage. In this paper, a method that permits direct and massively parallel nanopatterning of the substrate surface by laser irradiation is investigated. Polystyrene spherical particles were deposited on the surface in a monolayer array by self-assembly, The array was then irradiated with a 248-nm KrF laser. A sub-micron nanodent array can be obtained after single-pulse irradiation. These nanodents change their shapes at different laser energies. The optical near-field distribution around the particles was calculated according to the exact solution of the light-scattering problem. The influence of the presence of the substrate on the optical near field was also studied. The mechanisms for the generation of the nanodent structures are discussed.

AB - Parallel nanostructuring of a GeSbTe film may significantly improve the recording performance in data storage. In this paper, a method that permits direct and massively parallel nanopatterning of the substrate surface by laser irradiation is investigated. Polystyrene spherical particles were deposited on the surface in a monolayer array by self-assembly, The array was then irradiated with a 248-nm KrF laser. A sub-micron nanodent array can be obtained after single-pulse irradiation. These nanodents change their shapes at different laser energies. The optical near-field distribution around the particles was calculated according to the exact solution of the light-scattering problem. The influence of the presence of the substrate on the optical near field was also studied. The mechanisms for the generation of the nanodent structures are discussed.

U2 - 10.1007/s00339-004-2860-2

DO - 10.1007/s00339-004-2860-2

M3 - Article

SN - 1432-0630

VL - 79

SP - 1603

EP - 1606

JO - Applied Physics A: Materials Science and Processing

JF - Applied Physics A: Materials Science and Processing

IS - 4-6

ER -

Parallel nanostructuring of GeSbTe film with particle mask

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