Original language | English |
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Title of host publication | Progress in Plasma Processing of Materials |
Pages | 277-284 |
Number of pages | 8 |
Publication status | Published - 1999 |
Event | Progress in Plasma Processing of Materials - Duration: 1 Jan 1824 → … |
Conference
Conference | Progress in Plasma Processing of Materials |
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Period | 1/01/24 → … |