Plasma surface engineering of metals

Kyon Tschong Rie; Erich Menthe; Allan Matthews; Keith Legg; Jack Chin

doi:10.1557/S0883769400035715

Plasma surface engineering of metals

Kyon Tschong Rie, Erich Menthe, Allan Matthews, Keith Legg, Jack Chin

Materials Engineering

Research output: Contribution to journal › Article › peer-review

Abstract

The marketplace is continually demanding better functionality in the surface and near-surface properties of metal components and tools. In the last 20 years, plasma and ion-assisted techniques have enabled new methods to substantially improve wear, corrosion, and fatigue resistance. In most cases, plasmas are used to enhance well-established processes such as thermochemical diffusion treatment and physical and chemical vapor deposition (PVD and CVD), but their operation in a plasma atmosphere has led to major improvements in their reliability and efficacy, as well as extending the range of materials and components that can be treated.

Original language	English
Pages (from-to)	46-51
Number of pages	6
Journal	MRS Bulletin
Volume	21
Issue number	8
DOIs	https://doi.org/10.1557/S0883769400035715
Publication status	Published - Aug 1996

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Plasma surface engineering of metals

Abstract

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