TY - JOUR
T1 - Process parameters and directional effects on the optical properties of carbon films grown by plasma assisted PVD
AU - Dehbi-Alaoui, A.
AU - Matthews, A.
PY - 1992/4/15
Y1 - 1992/4/15
N2 - Carbon films have been grown on glass samples by evaporation of graphite in a butane de plasma enhanced by a negatively biased heated filament. The optical band gap and the bonded hydrogen content have been assessed, and these have been correlated to process parameters, such as sample and filament biases, emission and discharge currents, carbon content in the plasma and sample orientation. An empirical relationship has been derived relating the film properties and process parameters, and this can be used to explain how sample orientation and location can be important in achieving uniform and optimised properties.
AB - Carbon films have been grown on glass samples by evaporation of graphite in a butane de plasma enhanced by a negatively biased heated filament. The optical band gap and the bonded hydrogen content have been assessed, and these have been correlated to process parameters, such as sample and filament biases, emission and discharge currents, carbon content in the plasma and sample orientation. An empirical relationship has been derived relating the film properties and process parameters, and this can be used to explain how sample orientation and location can be important in achieving uniform and optimised properties.
UR - http://www.scopus.com/inward/record.url?eid=2-s2.0-50749134513&partnerID=MN8TOARS
U2 - 10.1016/0925-9635(92)90144-D
DO - 10.1016/0925-9635(92)90144-D
M3 - Article
SN - 0925-9635
VL - 1
SP - 445
EP - 449
JO - Diamond and Related Materials
JF - Diamond and Related Materials
IS - 5-6
ER -