Abstract
We report on the properties of high quality epitaxial InP grown by solid source molecular beam epitaxy (MBE) using polycrystalline GaP as a phosphorous source. The as-grown InP was n-type with a background impurity concentration of 1.2 × 1015 cm-3 and mobility of 4500 cm2/Vs at room temperature. Low temperature photoluminescence at 5 K showed free exciton together with donor and acceptor related band-edge emission. These results show that high quality InP can be grown by solid source MBE without the need for high temperature crackers or toxic hydride phosphorous sources.
Original language | English |
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Pages (from-to) | 2108-2109 |
Number of pages | 2 |
Journal | Japanese Journal of Applied Physics, Part 1: Regular Papers and Short Notes and Review Papers |
Volume | 35 |
Issue number | Pt1 : Number 4 A |
Publication status | Published - 1 Apr 1996 |
Keywords
- CBE
- GaP
- InP
- MBE
- MOCVD
- Phosphorous