Proton beam lithography at the University of Surrey's Ion Beam Centre

P Mistry, I Gomez-Morilla, GW Grime, R Webb, C Jeynes, R Gwilliarn, A Cansell, M Merchant, KJ Kirkby

Research output: Chapter in Book/Conference proceeding › Conference contribution › peer-review

Original language	English
Title of host publication	NUCLEAR INSTRUMENTS \\& METHODS IN PHYSICS RESEARCH SECTION B-BEAM INTERACTIONS WITH MATERIALS AND ATOMS
Publisher	Elsevier BV
Pages	387-389
Number of pages	3
Volume	242
DOIs	https://doi.org/10.1016/j.nimb.2005.08.128
Publication status	Published - 1 Jan 2006

Access to Document

Mistry, P., Gomez-Morilla, I., Grime, GW., Webb, R., Jeynes, C., Gwilliarn, R., Cansell, A., Merchant, M., & Kirkby, KJ. (2006). Proton beam lithography at the University of Surrey's Ion Beam Centre. In NUCLEAR INSTRUMENTS \\& METHODS IN PHYSICS RESEARCH SECTION B-BEAM INTERACTIONS WITH MATERIALS AND ATOMS (Vol. 242, pp. 387-389). Elsevier BV. https://doi.org/10.1016/j.nimb.2005.08.128

@inproceedings{68c0d7991c114d55a63946ac55481e5e,

title = "Proton beam lithography at the University of Surrey's Ion Beam Centre",

author = "P Mistry and I Gomez-Morilla and GW Grime and R Webb and C Jeynes and R Gwilliarn and A Cansell and M Merchant and KJ Kirkby",

year = "2006",

month = jan,

day = "1",

doi = "10.1016/j.nimb.2005.08.128",

language = "English",

volume = "242",

pages = "387--389",

booktitle = "NUCLEAR INSTRUMENTS \\& METHODS IN PHYSICS RESEARCH SECTION B-BEAM INTERACTIONS WITH MATERIALS AND ATOMS",

publisher = "Elsevier BV",

address = "Netherlands",

}

Mistry, P, Gomez-Morilla, I, Grime, GW, Webb, R, Jeynes, C, Gwilliarn, R, Cansell, A, Merchant, M & Kirkby, KJ 2006, Proton beam lithography at the University of Surrey's Ion Beam Centre. in NUCLEAR INSTRUMENTS \\& METHODS IN PHYSICS RESEARCH SECTION B-BEAM INTERACTIONS WITH MATERIALS AND ATOMS. vol. 242, Elsevier BV, pp. 387-389. https://doi.org/10.1016/j.nimb.2005.08.128

TY - GEN

T1 - Proton beam lithography at the University of Surrey's Ion Beam Centre

AU - Mistry, P

AU - Gomez-Morilla, I

AU - Grime, GW

AU - Webb, R

AU - Jeynes, C

AU - Gwilliarn, R

AU - Cansell, A

AU - Merchant, M

AU - Kirkby, KJ

PY - 2006/1/1

Y1 - 2006/1/1

U2 - 10.1016/j.nimb.2005.08.128

DO - 10.1016/j.nimb.2005.08.128

M3 - Conference contribution

VL - 242

SP - 387

EP - 389

BT - NUCLEAR INSTRUMENTS \\& METHODS IN PHYSICS RESEARCH SECTION B-BEAM INTERACTIONS WITH MATERIALS AND ATOMS

PB - Elsevier BV

ER -