Raman spectra of hard carbon films and hard carbon films containing secondary elements

T. J. Dines; D. Tither; A. Dehbi; A. Matthews

doi:10.1016/0008-6223(91)90073-R

Raman spectra of hard carbon films and hard carbon films containing secondary elements

T. J. Dines^*, D. Tither, A. Dehbi, A. Matthews

^*Corresponding author for this work

Materials Engineering

Research output: Contribution to journal › Article › peer-review

Abstract

Raman spectroscopy has been used to investigate the structure and bonding in a number of carbon films prepared by plasma physical vapour deposition and chemical vapour deposition. Several secondary elements have been introduced into the structure of the coatings to observe their influence on the coating-substrate assembly. The spectra show that the samples arc composed of disordered carbon which is mainly sp²-bonded, but with some sp³ bonding. A detailed examination of the low wavenumber region of the specra (< 1,100 cm^-1) has revealed evidence for interaction with the silicon substrate. There is also evidence for CH and SiH bonding.

Original language	English
Pages (from-to)	225-231
Number of pages	7
Journal	Carbon
Volume	29
Issue number	2
DOIs	https://doi.org/10.1016/0008-6223(91)90073-R
Publication status	Published - 1 Jan 1991

Keywords

Carbon films
Raman spectroscopy

Access to Document

10.1016/0008-6223(91)90073-R

Cite this

@article{23a3e449c0bc46e8a0324d1e8c5d8060,

title = "Raman spectra of hard carbon films and hard carbon films containing secondary elements",

abstract = "Raman spectroscopy has been used to investigate the structure and bonding in a number of carbon films prepared by plasma physical vapour deposition and chemical vapour deposition. Several secondary elements have been introduced into the structure of the coatings to observe their influence on the coating-substrate assembly. The spectra show that the samples arc composed of disordered carbon which is mainly sp2-bonded, but with some sp3 bonding. A detailed examination of the low wavenumber region of the specra (< 1,100 cm-1) has revealed evidence for interaction with the silicon substrate. There is also evidence for CH and SiH bonding.",

keywords = "Carbon films, Raman spectroscopy",

author = "Dines, {T. J.} and D. Tither and A. Dehbi and A. Matthews",

year = "1991",

month = jan,

day = "1",

doi = "10.1016/0008-6223(91)90073-R",

language = "English",

volume = "29",

pages = "225--231",

journal = "Carbon",

issn = "0008-6223",

publisher = "Elsevier BV",

number = "2",

}

TY - JOUR

T1 - Raman spectra of hard carbon films and hard carbon films containing secondary elements

AU - Dines, T. J.

AU - Tither, D.

AU - Dehbi, A.

AU - Matthews, A.

PY - 1991/1/1

Y1 - 1991/1/1

N2 - Raman spectroscopy has been used to investigate the structure and bonding in a number of carbon films prepared by plasma physical vapour deposition and chemical vapour deposition. Several secondary elements have been introduced into the structure of the coatings to observe their influence on the coating-substrate assembly. The spectra show that the samples arc composed of disordered carbon which is mainly sp2-bonded, but with some sp3 bonding. A detailed examination of the low wavenumber region of the specra (< 1,100 cm-1) has revealed evidence for interaction with the silicon substrate. There is also evidence for CH and SiH bonding.

AB - Raman spectroscopy has been used to investigate the structure and bonding in a number of carbon films prepared by plasma physical vapour deposition and chemical vapour deposition. Several secondary elements have been introduced into the structure of the coatings to observe their influence on the coating-substrate assembly. The spectra show that the samples arc composed of disordered carbon which is mainly sp2-bonded, but with some sp3 bonding. A detailed examination of the low wavenumber region of the specra (< 1,100 cm-1) has revealed evidence for interaction with the silicon substrate. There is also evidence for CH and SiH bonding.

KW - Carbon films

KW - Raman spectroscopy

UR - http://www.scopus.com/inward/record.url?scp=0025757644&partnerID=8YFLogxK

U2 - 10.1016/0008-6223(91)90073-R

DO - 10.1016/0008-6223(91)90073-R

M3 - Article

AN - SCOPUS:0025757644

SN - 0008-6223

VL - 29

SP - 225

EP - 231

JO - Carbon

JF - Carbon

IS - 2

ER -

Raman spectra of hard carbon films and hard carbon films containing secondary elements

Abstract

Keywords

Access to Document

Other files and links

Fingerprint

Cite this