Reduction of Phosphorus Diffusion in Silicon by fluorine co- implantation

Huda El Mubarek, H.A.W. El Mubarek

Research output: Contribution to conference › Other

Original language	English
Publication status	Published - Jun 2010
Event	European Materials Research Society Spring Meeting (EMRS) - Strasbourg France Duration: 7 Jun 2010 → 11 Jun 2010

Conference	European Materials Research Society Spring Meeting (EMRS)
City	Strasbourg France
Period	7/06/10 → 11/06/10

Keywords

@conference{d727c2db4ec74229bad8a8f0a3fd3e6a,

title = "Reduction of Phosphorus Diffusion in Silicon by fluorine co- implantation",

keywords = "Phosphorus and Fluorine",

author = "{El Mubarek}, Huda and Mubarek, {H.A.W. El}",

year = "2010",

month = jun,

language = "English",

note = "European Materials Research Society Spring Meeting (EMRS) ; Conference date: 07-06-2010 Through 11-06-2010",

}