Reflection/transmission confocal microscopy characterization of single-crystal diamond microlens arrays

E. Gu; H. W. Choi; C. Liu; C. Griffin; J. M. Girkin; I. M. Watson; M. D. Dawson; G. McConnell; A. M. Gurney

doi:10.1063/1.1695101

Reflection/transmission confocal microscopy characterization of single-crystal diamond microlens arrays

E. Gu, H. W. Choi, C. Liu, C. Griffin, J. M. Girkin, I. M. Watson, M. D. Dawson, G. McConnell, A. M. Gurney

Research output: Contribution to journal › Article › peer-review

Abstract

The microlens arrays in type-IIa natural single-crystal diamond were fabricated using the method of photoresist reflow and inductively coupled plasma etching. A laser scanning reflection/transmission confocal microscopy technique has been developed to characterize the optical properties of diamond microlens arrays. It was found that the technique enabled the surface profile of the microlenses to be measured simultaneously with optical parameters including focal length and spot size. The results show that the type-IIa single-crystal diamond microlenses will enable applications in photonics and optoelectronics.

Original language	English
Pages (from-to)	2754-2756
Number of pages	2
Journal	Applied Physics Letters
Volume	84
Issue number	15
DOIs	https://doi.org/10.1063/1.1695101
Publication status	Published - 12 Apr 2004

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title = "Reflection/transmission confocal microscopy characterization of single-crystal diamond microlens arrays",

abstract = "The microlens arrays in type-IIa natural single-crystal diamond were fabricated using the method of photoresist reflow and inductively coupled plasma etching. A laser scanning reflection/transmission confocal microscopy technique has been developed to characterize the optical properties of diamond microlens arrays. It was found that the technique enabled the surface profile of the microlenses to be measured simultaneously with optical parameters including focal length and spot size. The results show that the type-IIa single-crystal diamond microlenses will enable applications in photonics and optoelectronics.",

author = "E. Gu and Choi, {H. W.} and C. Liu and C. Griffin and Girkin, {J. M.} and Watson, {I. M.} and Dawson, {M. D.} and G. McConnell and Gurney, {A. M.}",

year = "2004",

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doi = "10.1063/1.1695101",

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T1 - Reflection/transmission confocal microscopy characterization of single-crystal diamond microlens arrays

AU - Gu, E.

AU - Choi, H. W.

AU - Liu, C.

AU - Griffin, C.

AU - Girkin, J. M.

AU - Watson, I. M.

AU - Dawson, M. D.

AU - McConnell, G.

AU - Gurney, A. M.

PY - 2004/4/12

Y1 - 2004/4/12

N2 - The microlens arrays in type-IIa natural single-crystal diamond were fabricated using the method of photoresist reflow and inductively coupled plasma etching. A laser scanning reflection/transmission confocal microscopy technique has been developed to characterize the optical properties of diamond microlens arrays. It was found that the technique enabled the surface profile of the microlenses to be measured simultaneously with optical parameters including focal length and spot size. The results show that the type-IIa single-crystal diamond microlenses will enable applications in photonics and optoelectronics.

AB - The microlens arrays in type-IIa natural single-crystal diamond were fabricated using the method of photoresist reflow and inductively coupled plasma etching. A laser scanning reflection/transmission confocal microscopy technique has been developed to characterize the optical properties of diamond microlens arrays. It was found that the technique enabled the surface profile of the microlenses to be measured simultaneously with optical parameters including focal length and spot size. The results show that the type-IIa single-crystal diamond microlenses will enable applications in photonics and optoelectronics.

U2 - 10.1063/1.1695101

DO - 10.1063/1.1695101

M3 - Article

SN - 0003-6951

VL - 84

SP - 2754

EP - 2756

JO - Applied Physics Letters

JF - Applied Physics Letters

IS - 15

ER -

Reflection/transmission confocal microscopy characterization of single-crystal diamond microlens arrays

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