Small grain size zirconium-based coatings deposited by magnetron sputtering at low temperatures

Engineering

• Low-Temperature 100%
• Ray Diffraction 100%
• Glancing Angle 100%
• Magnetron 100%
• Deposition Parameter 100%
• Solid Solution 100%
• Defects 50%
• Young's Modulus 50%
• Nitride 50%
• Physical Vapor Deposition 50%
• Glow Discharge 50%
• Hardness Value 50%
• Substrate Temperature 50%
• Coating Property 50%
• Gas Flowrate 50%
• Fixed Parameter 50%
• Strengthening Effect 50%
• Component Coating 50%
• Nitrogen Flow Rate 50%
• Substrate Bias 50%
• Sputter Target 50%
• Cross Section 50%
• Silicon Wafer 50%

Material Science

• X-Ray Diffraction 100%
• Zirconium 100%
• Scanning Electron Microscopy 100%
• Grain Size 100%
• Magnetron Sputtering 100%
• Solid Solution 100%
• Elastic Moduli 50%
• Nitride Compound 50%
• Structure (Composition) 50%
• Nanoindentation 50%
• Silicon Wafer 50%
• Emission Spectroscopy 50%
• Gas Flow 50%
• Analytical Method 50%
• Grain Refinement 50%
• Boron 50%
• Physical Vapor Deposition 50%
• Amorphous Material 50%