SPECIAL ISSUE ON PLASMA DEPOSITION

RL BOXMAN; A MATTHEWS; CV DESHPANDY; S GOLDSMITH; R AVNI; E PFENDER

SPECIAL ISSUE ON PLASMA DEPOSITION

RL BOXMAN
, A MATTHEWS
, CV DESHPANDY
, S GOLDSMITH
, R AVNI
, E PFENDER

Research output: Contribution to journal › Article › peer-review

Original language	Undefined
Journal	IEEE Transactions on Plasma Science
Publication status	Published - 1990

Cite this

TY - JOUR

T1 - SPECIAL ISSUE ON PLASMA DEPOSITION

AU - BOXMAN, RL

AU - MATTHEWS, A

AU - DESHPANDY, CV

AU - GOLDSMITH, S

AU - AVNI, R

AU - PFENDER, E

PY - 1990

Y1 - 1990

UR - http://gateway.webofknowledge.com/gateway/Gateway.cgi?GWVersion=2&SrcAuth=ORCID&SrcApp=OrcidOrg&DestLinkType=FullRecord&DestApp=WOS_CPL&KeyUT=WOS:A1990EM92500001&KeyUID=WOS:A1990EM92500001

M3 - Article

SN - 0093-3813

JO - IEEE Transactions on Plasma Science

JF - IEEE Transactions on Plasma Science

ER -

SPECIAL ISSUE ON PLASMA DEPOSITION

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