Stealth dicing of sapphire sheets with low surface roughness, zero kerf width, debris/crack-free and zero taper using a femtosecond Bessel beam

Zhaoqing Li, Xuefeng Wang, Junlong Wang, Olivier Allegre, Wei Guo, Wenyan Gao, Nan Jia, Lin Li

Research output: Contribution to journal › Article › peer-review

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