Stealth dicing of sapphire sheets with low surface roughness, zero kerf width, debris/crack-free and zero taper using a femtosecond Bessel beam

Zhaoqing Li, Xuefeng Wang, Junlong Wang, Olivier Allegre, Wei Guo, Wenyan Gao, Nan Jia, Lin Li

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Allegre, O. (PI), Crosby, D. (PI), Domingos, M. (PI), Francis, J. (PI), Gillen, D. (PI), Guo, W. (PI), Li, L. (PI), Mativenga, P. (PI), Rogers, B. D. (PI), Whitehead, D. (PI), Wilson, D. (PI), Zhong, S. (PI), Mirhosseini, N. (Researcher), Ouyang, J. (Researcher), Huang, Y. (Researcher), Wei, C. (Researcher), Cheng, D. (PGR student), Suryo Pratomo, E. (PGR student), Zhang, Z. (PGR student), Li, Z. (PGR student), Mo, H. (PGR student), Zhu, M. (PGR student), Li, Q. (PGR student), Liu, W. (PGR student), Wang, L. (PGR student), Guo, H. (PGR student), Heinemann, R. (PI) & Liu, Z. (PI)
1/04/00 → …
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