Abstract
The use of polychromatic synchrotron radiation in energy-dispersive mode for the rapid characterization of thin film and multilayer materials was studied. The technique takes advantage of the high intensity and excellent collimation properties of white beam synchrotron radiation. The glancing angle diffraction geometry allows structural depth probing and enhanced signal-to-noise by suppressing substrate contributions. The technique was successfully applied to metallic films a few hundred Å thick, and to W-C multilayers. [on SciFinder(R)]
| Original language | English |
|---|---|
| Publisher | Daresbury Nuclear Physics Laboratory |
| Publication status | Published - 1989 |
Keywords
- Metals Role: PRP (Properties) (characterization of thin films of, by polychromatic synchrotron radiation)
- Films (characterization of, by energy-dispersive diffraction of synchrotron radiation)
- tungsten carbon multilayer characterization
- metal film polychromatic synchrotron radiation