SU-8 micromachined WR-3 band waveguide bandpass filter with low insertion loss

J. Xu, Y. Tian, X. Shang, Q. Chen, M.J. Lancaster

    Research output: Contribution to journalArticlepeer-review

    Abstract

    Presented is a WR-3 band (220-325 GHz) waveguide bandpass filter, which is constructed from three offset waveguide resonators operating at TE101 mode. This directly coupled resonator filter with Chebyshev response is designed to have a centre frequency of 300 GHz, a fractional bandwidth of 3.3% and a passband return loss of 20 dB. This filter is fabricated using thick SU-8 photoresist micromachining technique and has been tested. The measured average passband insertion loss is as low as around 0.4 dB. The measured return loss is better than 15 dB across the whole passband.
    Original languageEnglish
    Pages (from-to)480-482
    Number of pages3
    JournalElectronics Letters
    Volume49
    Issue number7
    DOIs
    Publication statusPublished - 1 Mar 2013

    Keywords

    • Chebyshev filters,Chebyshev response,SU-8 micromachined WR-3 band waveguide bandpass fi,SU-8 photoresist micromachining technique,TEtextless
    • subtextgreater101textless
    • /subtextgreater mode,band-pass filters,coupled resonator filter,frequency 220 GHz to 325 GHz,frequency 300 GHz,low insertion loss,micromachining,millimetre wave filters,noise figure 20 dB,off-set waveguide resonator,passband return loss,waveguide filters

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