Abstract
This International Standard provides a digital format to store and transfer between computers, in a compact way, important calibration and instrumental parameter data necessary to make effective use of spectral data files from static SIMS instruments. This format is designed to supplement the data transfer format specified in ISO 14976. © Crown Copyright 2004. Reproduced with the permission of Her Majesty's Stationary Office. Published by John Wiley & Sons Ltd.
Original language | English |
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Pages (from-to) | 1642-1644 |
Number of pages | 2 |
Journal | Surface and Interface Analysis |
Volume | 36 |
Issue number | 13 |
DOIs | |
Publication status | Published - 15 Dec 2004 |
Keywords
- Data transfer format
- Mass scale
- Secondary ion
- Secondary ion mass spectrometry
- SIMS
- Time of flight
- ToF