Tailored laser vector fields for high-precision micro-manufacturing

    Research output: Contribution to journalArticlepeer-review

    Abstract

    Laser processes used in high-precision micro-manufacturing are limited to sub-optimal parameters determined by the inherent characteristics of chosen laser beams and optics. As a result, the processing accuracy and speed can be reduced. Optical techniques for spatial structuring of laser beam fields allow improved resolution imaging, yet this has not widely been used in the context of laser micro-manufacturing. This paper presents materials processing with structured beams to engineer tailored focal fields and produce specific surface structures on silicon. Our results using radial and azimuthal fields combined with vortex wavefronts illustrate the potential of these techniques for micro-processing applications.
    Original languageEnglish
    JournalCIRP Annals
    Early online date15 May 2019
    DOIs
    Publication statusPublished - 2019

    Keywords

    • Laser micro machining
    • Laser
    • Optical

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