Abstract
A tapered coaxial cavity probe sensor is introduced to demonstrate progressive improvements in the spatial resolution of metallisation patterns for scanning microwave microscopy (SMM) applications. Two versions of this design are described and experimental results illustrate the advantages of a reduced end area surrounding the projecting probe.
Original language | English |
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Pages (from-to) | 1483-1484 |
Number of pages | 1 |
Journal | Electronics Letters |
Volume | 40 |
Issue number | 23 |
DOIs | |
Publication status | Published - 11 Nov 2004 |