The aerosol-assisted CVD of silver films from single-source precursors

Arunkumar Panneerselvam, Mohammad A. Malik, Paul O'Brien, Madeleine Helliwell

    Research output: Contribution to journalArticlepeer-review

    Abstract

    Thin films of silver are deposited from tetraphenyldioxoimidodiphosphinato silver(I) [Ag{(OPPh2)2N}]4 2H2O(1) and silver(I) triflouoroacetate CF3COOAg (2) single-source precursors (SSPs) by the aerosol-assisted (AA)CVD method. The complex (1) is a tetramer with linear and distorted tetrahedral coordination modes at silver. Two types of films, silvery and brownish, are observed from both SSPs due to the temperature gradient in the AACVD reactor. The as-deposited films are characterized by X-ray diffraction (XRD), scanning electron microscopy (SEM), energy dispersive X-ray (EDX) analysis, and ultraviolet/visible (UV-vis) spectroscopy methods. © 2009 WILEY-VCH Verlag GmbH & Co. KGaA.
    Original languageEnglish
    Pages (from-to)57-63
    Number of pages6
    JournalChemical Vapor Deposition
    Volume15
    Issue number1-3
    DOIs
    Publication statusPublished - Mar 2009

    Keywords

    • AACVD
    • Silver
    • Single-source precursors
    • Temperature gradient
    • Thin films

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