Abstract
Focused ion beams (FIB) are widely used to locally sputter away material from
surfaces at the nanoscale, but the effect of localised geometry changes and surface damage
generated by FIB processing on material stress states are poorly understood. Evolution of stress
states has been investigated in alumina samples with high local residual stress concentrations
around nanoindents and scratches. Crack morphologies under the nanoindents and scratches
have been investigated with respect to the location and geometry of the ‘cross-sectional’
surface trenches machined by FIB. It is found that the density of cracks observed around the
nanoindentation sites depends on the location and milling sequence of the cross-sectional FIB
trenches which alter local stress states. Cr3+ fluorescence spectroscopy has additionally been
used to map stresses around alumina scratch and FIB-machined surface trenches.
surfaces at the nanoscale, but the effect of localised geometry changes and surface damage
generated by FIB processing on material stress states are poorly understood. Evolution of stress
states has been investigated in alumina samples with high local residual stress concentrations
around nanoindents and scratches. Crack morphologies under the nanoindents and scratches
have been investigated with respect to the location and geometry of the ‘cross-sectional’
surface trenches machined by FIB. It is found that the density of cracks observed around the
nanoindentation sites depends on the location and milling sequence of the cross-sectional FIB
trenches which alter local stress states. Cr3+ fluorescence spectroscopy has additionally been
used to map stresses around alumina scratch and FIB-machined surface trenches.
| Original language | Undefined |
|---|---|
| Title of host publication | Journal of Physics |
| Subtitle of host publication | Conference Series |
| Pages | 219-222 |
| Number of pages | 4 |
| Volume | 26 |
| DOIs | |
| Publication status | Published - 2006 |