The effect of metal-rich growth conditions on the microstructure of ScxGa1-xN films grown using molecular beam epitaxy

H. C. L. Tsui, L. E. Goff, N. P. Barradas, E. Alves, S. Pereira, H. E. Beere, I. Farrer, C. A. Nicoll, D. A. Ritchie, M. A. Moram

    Research output: Contribution to journalArticlepeer-review

    Abstract

    Epitaxial ScxGa1−xN films with 0 ≤ x ≤ 0.50 were grown using molecular beam epitaxy under metal-rich conditions. The ScxGa1−xN growth rate increased with increasing Sc flux despite the use of metal-rich growth conditions, which is attributed to the catalytic decomposition of N2 induced by the presence of Sc. Microstructural analysis showed that phase-pure wurtzite ScxGa1−xN was achieved up to x = 0.26, which is significantly higher than that previously reported for nitrogen-rich conditions, indicating that the use of metal-rich conditions can help to stabilise wurtzite phase ScxGa1−xN.
    Original languageEnglish
    Pages (from-to)2837-2842
    JournalPhysica Status Solidi. A: Applications and Materials Science
    Volume212
    Issue number12
    DOIs
    Publication statusPublished - 9 Dec 2015

    Keywords

    • molecular beam epitaxy
    • scandium gallium nitrides
    • transmission electron microscopy

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