Abstract
Epitaxial ScxGa1−xN films with 0 ≤ x ≤ 0.50 were grown using molecular beam epitaxy under metal-rich conditions. The ScxGa1−xN growth rate increased with increasing Sc flux despite the use of metal-rich growth conditions, which is attributed to the catalytic decomposition of N2 induced by the presence of Sc. Microstructural analysis showed that phase-pure wurtzite ScxGa1−xN was achieved up to x = 0.26, which is significantly higher than that previously reported for nitrogen-rich conditions, indicating that the use of metal-rich conditions can help to stabilise wurtzite phase ScxGa1−xN.
Original language | English |
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Pages (from-to) | 2837-2842 |
Journal | Physica Status Solidi. A: Applications and Materials Science |
Volume | 212 |
Issue number | 12 |
DOIs | |
Publication status | Published - 9 Dec 2015 |
Keywords
- molecular beam epitaxy
- scandium gallium nitrides
- transmission electron microscopy