The incorporation of erbium into molecular beam epitaxy grown gallium arsenide

P. Rutter, K. E. Singer*, A. R. Peaker

*Corresponding author for this work

Research output: Contribution to journalArticlepeer-review

Abstract

Erbium-doped gallium arsenide has been grown by molecular beam epitaxy under varying growth conditions and analysed by secondary ion mass spectrometry. The concentration of erbium incorporated into the gallium arsenide lattice for a given effusion cell temperature has been found to vary considerably with the V : III (As : Ga) flux ratio. Higher levels of erbium incorporation occur when growth takes place close to stoichiometry rather than under arsenic-rich conditions. This behaviour has been observed for erbium concentrations between 1016 and 5 x 1019 cm-3. SIMS data show the existence of an erbium-rich surface layer which, in the presence of unintentional impurities, is incorporated into the GaAs at an enhanced rate forming an unusual doping spike.

Original languageEnglish
Pages (from-to)247-254
Number of pages8
JournalJournal of Crystal Growth
Volume182
Issue number3-4
DOIs
Publication statusPublished - Dec 1997

Keywords

  • Erbium
  • Gallium arsenide
  • Molecular beam epitaxial growth
  • Thin films

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