The influence of neon in the deposition of titanium nitride by plasma-assisted physical vapour deposition

Kevin S. Fancey, A. Leyland, Fadhel Moh'd Badow, Allan Matthews

Research output: Contribution to journalArticlepeer-review

Abstract

Titanium nitride coatings were produced by reactive (plasma-assisted) deposition in argon and neon-based nitrogenous discharges. Coating analysis has indicated that during deposition, nitrogen reactivity can be enhanced when neon is used, and this may be attributed to Penning ionisation. The effect could assist deposition onto heat-sensitive materials by permitting lower processing temperatures.

Original languageEnglish
Pages (from-to)227-231
Number of pages5
JournalMaterials Science and Engineering A
Volume262
Issue number1-2
Publication statusPublished - 1 Apr 1999

Keywords

  • Neon
  • Penning ionisation
  • PVD
  • Titanium nitride

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