The influence of neon in the deposition of titanium nitride by plasma-assisted physical vapour deposition

Kevin S. Fancey; A. Leyland; Fadhel Moh'd Badow; Allan Matthews

The influence of neon in the deposition of titanium nitride by plasma-assisted physical vapour deposition

Kevin S. Fancey^*, A. Leyland, Fadhel Moh'd Badow, Allan Matthews

^*Corresponding author for this work

Materials Engineering

The University of Hull

Research output: Contribution to journal › Article › peer-review

Abstract

Titanium nitride coatings were produced by reactive (plasma-assisted) deposition in argon and neon-based nitrogenous discharges. Coating analysis has indicated that during deposition, nitrogen reactivity can be enhanced when neon is used, and this may be attributed to Penning ionisation. The effect could assist deposition onto heat-sensitive materials by permitting lower processing temperatures.

Original language	English
Pages (from-to)	227-231
Number of pages	5
Journal	Materials Science and Engineering A
Volume	262
Issue number	1-2
Publication status	Published - 1 Apr 1999

Keywords

Neon
Penning ionisation
PVD
Titanium nitride

Cite this

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title = "The influence of neon in the deposition of titanium nitride by plasma-assisted physical vapour deposition",

abstract = "Titanium nitride coatings were produced by reactive (plasma-assisted) deposition in argon and neon-based nitrogenous discharges. Coating analysis has indicated that during deposition, nitrogen reactivity can be enhanced when neon is used, and this may be attributed to Penning ionisation. The effect could assist deposition onto heat-sensitive materials by permitting lower processing temperatures.",

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AU - Fancey, Kevin S.

AU - Leyland, A.

AU - Moh'd Badow, Fadhel

AU - Matthews, Allan

PY - 1999/4/1

Y1 - 1999/4/1

N2 - Titanium nitride coatings were produced by reactive (plasma-assisted) deposition in argon and neon-based nitrogenous discharges. Coating analysis has indicated that during deposition, nitrogen reactivity can be enhanced when neon is used, and this may be attributed to Penning ionisation. The effect could assist deposition onto heat-sensitive materials by permitting lower processing temperatures.

AB - Titanium nitride coatings were produced by reactive (plasma-assisted) deposition in argon and neon-based nitrogenous discharges. Coating analysis has indicated that during deposition, nitrogen reactivity can be enhanced when neon is used, and this may be attributed to Penning ionisation. The effect could assist deposition onto heat-sensitive materials by permitting lower processing temperatures.

KW - Neon

KW - Penning ionisation

KW - PVD

KW - Titanium nitride

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SN - 0921-5093

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JO - Materials Science and Engineering A

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IS - 1-2

ER -

The influence of neon in the deposition of titanium nitride by plasma-assisted physical vapour deposition

Abstract

Keywords

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