The influence of neon in the deposition of titanium nitride by plasma-assisted physical vapour deposition

Kevin S. Fancey, A. Leyland, Fadhel Moh'd Badow, Allan Matthews

Research output: Contribution to journalArticlepeer-review

Fingerprint

Dive into the research topics of 'The influence of neon in the deposition of titanium nitride by plasma-assisted physical vapour deposition'. Together they form a unique fingerprint.

Material Science

Chemical Engineering